GB1323274A - Devices for coating by sputtering plates of glass ceramic and plastics panels - Google Patents

Devices for coating by sputtering plates of glass ceramic and plastics panels

Info

Publication number
GB1323274A
GB1323274A GB1493672A GB1493672A GB1323274A GB 1323274 A GB1323274 A GB 1323274A GB 1493672 A GB1493672 A GB 1493672A GB 1493672 A GB1493672 A GB 1493672A GB 1323274 A GB1323274 A GB 1323274A
Authority
GB
United Kingdom
Prior art keywords
plates
cathodes
sputtering
coating
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1493672A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Flachglas Wernberg GmbH
Original Assignee
Flachglas Wernberg GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2116190A external-priority patent/DE2116190C3/de
Application filed by Flachglas Wernberg GmbH filed Critical Flachglas Wernberg GmbH
Publication of GB1323274A publication Critical patent/GB1323274A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB1493672A 1971-04-02 1972-03-30 Devices for coating by sputtering plates of glass ceramic and plastics panels Expired GB1323274A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2116190A DE2116190C3 (de) 1971-04-02 1971-04-02 Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung

Publications (1)

Publication Number Publication Date
GB1323274A true GB1323274A (en) 1973-07-11

Family

ID=5803722

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1493672A Expired GB1323274A (en) 1971-04-02 1972-03-30 Devices for coating by sputtering plates of glass ceramic and plastics panels

Country Status (4)

Country Link
US (1) US3738928A (OSRAM)
BE (1) BE781443A (OSRAM)
FR (1) FR2132033B1 (OSRAM)
GB (1) GB1323274A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2202169B2 (OSRAM) * 1972-10-07 1977-05-27 Delog Detag Flachglas Ag
US3976555A (en) * 1975-03-20 1976-08-24 Coulter Information Systems, Inc. Method and apparatus for supplying background gas in a sputtering chamber
US4194962A (en) * 1978-12-20 1980-03-25 Advanced Coating Technology, Inc. Cathode for sputtering
US4274936A (en) * 1979-04-30 1981-06-23 Advanced Coating Technology, Inc. Vacuum deposition system and method
US20140246311A1 (en) * 2013-03-01 2014-09-04 Poole Ventura, Inc. In-situ sputtering apparatus

Also Published As

Publication number Publication date
FR2132033B1 (OSRAM) 1975-10-24
BE781443A (fr) 1972-07-17
FR2132033A1 (OSRAM) 1972-11-17
US3738928A (en) 1973-06-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee