GB1312811A - Method for reducing damage at metal interfaces - Google Patents

Method for reducing damage at metal interfaces

Info

Publication number
GB1312811A
GB1312811A GB2625370A GB2625370A GB1312811A GB 1312811 A GB1312811 A GB 1312811A GB 2625370 A GB2625370 A GB 2625370A GB 2625370 A GB2625370 A GB 2625370A GB 1312811 A GB1312811 A GB 1312811A
Authority
GB
United Kingdom
Prior art keywords
interface
diffusion
reducing damage
metal
june
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2625370A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1312811A publication Critical patent/GB1312811A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
GB2625370A 1969-06-30 1970-06-01 Method for reducing damage at metal interfaces Expired GB1312811A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83777869A 1969-06-30 1969-06-30

Publications (1)

Publication Number Publication Date
GB1312811A true GB1312811A (en) 1973-04-11

Family

ID=25275395

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2625370A Expired GB1312811A (en) 1969-06-30 1970-06-01 Method for reducing damage at metal interfaces

Country Status (6)

Country Link
JP (1) JPS493310B1 (enrdf_load_stackoverflow)
AU (1) AU1686870A (enrdf_load_stackoverflow)
CH (1) CH536557A (enrdf_load_stackoverflow)
DE (1) DE2031818A1 (enrdf_load_stackoverflow)
FR (1) FR2048036B1 (enrdf_load_stackoverflow)
GB (1) GB1312811A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL292995A (enrdf_load_stackoverflow) * 1962-05-25 1900-01-01
US3241931A (en) * 1963-03-01 1966-03-22 Rca Corp Semiconductor devices

Also Published As

Publication number Publication date
DE2031818A1 (de) 1971-01-14
FR2048036B1 (enrdf_load_stackoverflow) 1974-10-31
JPS493310B1 (enrdf_load_stackoverflow) 1974-01-25
AU1686870A (en) 1972-01-06
FR2048036A1 (enrdf_load_stackoverflow) 1971-03-19
CH536557A (de) 1973-04-30

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee