GB1277130A - Scanning microscopy apparatus - Google Patents

Scanning microscopy apparatus

Info

Publication number
GB1277130A
GB1277130A GB57986/69A GB5798669A GB1277130A GB 1277130 A GB1277130 A GB 1277130A GB 57986/69 A GB57986/69 A GB 57986/69A GB 5798669 A GB5798669 A GB 5798669A GB 1277130 A GB1277130 A GB 1277130A
Authority
GB
United Kingdom
Prior art keywords
sample
diffracted
intensity
topograph
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB57986/69A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1277130A publication Critical patent/GB1277130A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/205—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials using diffraction cameras
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1277130 X-ray crystallography INTERNATIONAL BUSINESS MACHINES CORP 27 Nov 1969 [16 Dec 1968] 57986/69 Heading G1A [Also in Divisions H4 and H5] In an apparatus for examining a crystalline material 4, comprising a source 1, e.g. of X-rays, irradiating a portion of the sample, a detector 6 receiving the diffracted X-ray beam and a position control unit 15 for imparting a back and forth scanning movement to the sample between the positions L1 and L2 along the line B-B<SP>1</SP>, there is provided a feedback control unit 18 supplied by the detector output and which controls by means of the unit 15 the angular orientation # of the incident beam is as to maintain this angle substantially at the Bragg angle throughout each scan by maintaining the intensity of the diffracted beam at a maximum. The intensity of the diffracted beam, whose minor intensity fluctuations convey information regarding the crystalline sample, is recorded on a photographic plate 12 scanning at the same linear rate as the sample and separated therefrom by an X-ray stop 10 having an opening 8. The detector 6 may be a scintillation counter, geiger counter or vidicon tube. The feedback control unit includes a rate converter, for differentiating the detector current, and a monostable multi-vibrator and integrator for supplying one component of the control signal. The other control component, a perturbation signal causing minor movements of the sample about the Bragg angle position, is supplied by an oscillator Figs. 2 and 9 (not shown) also included in the control unit. Instead of the photographic plate 12, the diffracted intensity may be recorded electronically using a topograph comparator system 20. Having made an electronic recording of the diffracted intensity variation produced by a sample, i.e. a topograph of the sample, this topograph may be compared with a standard topograph. In this way a signalling device, such as a light or typewriter output indicates whether or not the sample should be rejected.
GB57986/69A 1968-12-16 1969-11-27 Scanning microscopy apparatus Expired GB1277130A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US78405268A 1968-12-16 1968-12-16

Publications (1)

Publication Number Publication Date
GB1277130A true GB1277130A (en) 1972-06-07

Family

ID=25131201

Family Applications (1)

Application Number Title Priority Date Filing Date
GB57986/69A Expired GB1277130A (en) 1968-12-16 1969-11-27 Scanning microscopy apparatus

Country Status (4)

Country Link
US (1) US3609356A (en)
DE (1) DE1958234A1 (en)
FR (1) FR2026194A1 (en)
GB (1) GB1277130A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3444491A1 (en) * 1983-12-16 1985-08-29 Akademie der Wissenschaften der DDR, DDR 1086 Berlin X-ray topography camera for routine real structure diagnostics
GB2166630A (en) * 1984-10-27 1986-05-08 Mtu Muenchen Gmbh Method and apparatus for inspecting a crystalline object
DE4100680A1 (en) * 1991-01-11 1992-07-23 Siemens Ag Non-destructive detection of deformations of semiconductor crystal in housing - using goniometer to excite crystal by X=ray beam penetrating housing via shutter

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3944823A (en) * 1970-03-16 1976-03-16 Nippon Hoso Kyokai X-Ray topograph reproducing apparatus
JPH0691147B2 (en) * 1988-10-14 1994-11-14 信越半導体株式会社 Bonding wafer inspection method
JPH10521A (en) * 1996-06-07 1998-01-06 Nikon Corp Support device
EP1430514A2 (en) * 2001-09-18 2004-06-23 Koninklijke Philips Electronics N.V. Method of examining a wafer of semiconductor material by means of x-rays
GB0222334D0 (en) * 2001-10-04 2002-10-30 X Ray Res Gmbh Automatic adjusting method for a goniometer and associated device
WO2004013683A2 (en) * 2002-07-13 2004-02-12 University Of Georgia Research Foundation, Inc. Monitoring signal-to-noise ratio in x-ray diffraction data
WO2004077023A2 (en) * 2003-02-27 2004-09-10 University Of Georgia Research Foundation, Inc. High-throughput structure and electron density determination
US8111807B2 (en) * 2009-09-16 2012-02-07 Rigaku Corporation Crystallite size analysis method and apparatus using powder X-ray diffraction
US8590061B1 (en) 2011-03-22 2013-11-19 Iowa State University Research Foundation, Inc. Optimal excitation force design indentation-based rapid broadband nanomechanical spectroscopy
CN107271468B (en) * 2017-06-05 2019-09-06 国家纳米科学中心 A kind of evaluation method and its application of crystal electrons Density Distribution model
CN114121334A (en) * 2021-11-16 2022-03-01 湖州霍里思特智能科技有限公司 Ray collimation adjusting device
CN113936746B (en) * 2021-12-16 2022-02-22 中国工程物理研究院流体物理研究所 Quick analysis method, system, terminal and medium for ray diffraction of polyatomic system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3444491A1 (en) * 1983-12-16 1985-08-29 Akademie der Wissenschaften der DDR, DDR 1086 Berlin X-ray topography camera for routine real structure diagnostics
GB2166630A (en) * 1984-10-27 1986-05-08 Mtu Muenchen Gmbh Method and apparatus for inspecting a crystalline object
DE4100680A1 (en) * 1991-01-11 1992-07-23 Siemens Ag Non-destructive detection of deformations of semiconductor crystal in housing - using goniometer to excite crystal by X=ray beam penetrating housing via shutter

Also Published As

Publication number Publication date
DE1958234A1 (en) 1970-07-09
US3609356A (en) 1971-09-28
FR2026194A1 (en) 1970-09-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee