GB1234509A - - Google Patents

Info

Publication number
GB1234509A
GB1234509A GB1234509DA GB1234509A GB 1234509 A GB1234509 A GB 1234509A GB 1234509D A GB1234509D A GB 1234509DA GB 1234509 A GB1234509 A GB 1234509A
Authority
GB
United Kingdom
Prior art keywords
lens
electron
cylinders
superconducting
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1234509A publication Critical patent/GB1234509A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1416—Electromagnetic lenses with superconducting coils
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/871—Magnetic lens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Particle Accelerators (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)

Abstract

1,234,509. Electron and ion microscopes; superconductor lenses. SIEMENS A.G. 28 March, 1969 [31 May, 1968], No. 16356/69. Headings H1D, H1K and H1P. In a magnetic lens comprising two superconducting screening cylinders spaced apart to delimit a lens gap free of superconducting material and surrounded by a lens coil as in Specification 1,176,708, the screening cylinders are such that each has a higher current rating in the region adjacent the lens gap than its other regions. Preferably the adjacent end faces of the cylinders are shaped to correspond with the lines of force. The ends may be formed of material having a finer grain size, or alternatively the ends may be of the same material but have their current ratings increased by radiation-induced lattice defects produced by ion bombardment or by including fissile material in the ends and bombarding the ends with slow neutrons. A suitable material is Nb 3 Sn in fine powder form which is moulded in a press mould. The lens may be used in electron or ion microscopes or in diffraction apparatus.
GB1234509D 1968-05-31 1969-03-28 Expired GB1234509A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH815368 1968-05-31

Publications (1)

Publication Number Publication Date
GB1234509A true GB1234509A (en) 1971-06-03

Family

ID=4335977

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1234509D Expired GB1234509A (en) 1968-05-31 1969-03-28

Country Status (2)

Country Link
US (1) US3587013A (en)
GB (1) GB1234509A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2059781C3 (en) * 1970-12-04 1979-08-16 Siemens Ag, 1000 Berlin Und 8000 Muenchen Magnetic lens assembly
GB1395201A (en) * 1972-09-04 1975-05-21 Nat Res Dev Magnetic lenses
DE2307822C3 (en) * 1973-02-16 1982-03-18 Siemens AG, 1000 Berlin und 8000 München Superconducting lens system for corpuscular radiation
WO1993005529A1 (en) * 1991-08-30 1993-03-18 Hitachi, Ltd. Magnetic electron lens and electron microscope using same
US6051839A (en) 1996-06-07 2000-04-18 Arch Development Corporation Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes

Also Published As

Publication number Publication date
US3587013A (en) 1971-06-22
DE1805585B2 (en) 1976-08-12
DE1805585A1 (en) 1970-04-23

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years