GB1225227A - - Google Patents
Info
- Publication number
- GB1225227A GB1225227A GB1519169A GB1225227DA GB1225227A GB 1225227 A GB1225227 A GB 1225227A GB 1519169 A GB1519169 A GB 1519169A GB 1225227D A GB1225227D A GB 1225227DA GB 1225227 A GB1225227 A GB 1225227A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- metal
- aperture
- portions
- lithographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 abstract 7
- 238000005530 etching Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000005669 field effect Effects 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1519169 | 1969-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1225227A true GB1225227A (enrdf_load_stackoverflow) | 1971-03-17 |
Family
ID=10054634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1519169A Expired GB1225227A (enrdf_load_stackoverflow) | 1969-03-24 | 1969-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1225227A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3346831A1 (de) * | 1983-01-10 | 1984-07-12 | Tokyo Shibaura Denki K.K., Kawasaki | Halbleiterspeicherelement |
-
1969
- 1969-03-24 GB GB1519169A patent/GB1225227A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3346831A1 (de) * | 1983-01-10 | 1984-07-12 | Tokyo Shibaura Denki K.K., Kawasaki | Halbleiterspeicherelement |
| US4665418A (en) * | 1983-01-10 | 1987-05-12 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor memory device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |