GB1213534A - Analysis by bombardment with a beam of chemically reactive ions - Google Patents
Analysis by bombardment with a beam of chemically reactive ionsInfo
- Publication number
- GB1213534A GB1213534A GB5106668A GB5106668A GB1213534A GB 1213534 A GB1213534 A GB 1213534A GB 5106668 A GB5106668 A GB 5106668A GB 5106668 A GB5106668 A GB 5106668A GB 1213534 A GB1213534 A GB 1213534A
- Authority
- GB
- United Kingdom
- Prior art keywords
- ions
- ion
- bombardment
- cathode
- primary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 title abstract 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 9
- 229910052742 iron Inorganic materials 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 4
- -1 molecular oxygen ions Chemical class 0.000 abstract 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 239000004411 aluminium Substances 0.000 abstract 2
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- 229910052804 chromium Inorganic materials 0.000 abstract 2
- 239000011651 chromium Substances 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 1
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 abstract 1
- 230000001133 acceleration Effects 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000012159 carrier gas Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 229910001882 dioxygen Inorganic materials 0.000 abstract 1
- 230000002349 favourable effect Effects 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 238000010884 ion-beam technique Methods 0.000 abstract 1
- 229910052745 lead Inorganic materials 0.000 abstract 1
- 229910052749 magnesium Inorganic materials 0.000 abstract 1
- 229910052748 manganese Inorganic materials 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000000523 sample Substances 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000011701 zinc Substances 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/145—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using chemical ionisation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US67884067A | 1967-10-30 | 1967-10-30 | |
| US75382268A | 1968-07-12 | 1968-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1213534A true GB1213534A (en) | 1970-11-25 |
Family
ID=27102105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5106668A Expired GB1213534A (en) | 1967-10-30 | 1968-10-28 | Analysis by bombardment with a beam of chemically reactive ions |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4823478B1 (https=) |
| DE (1) | DE1806113B2 (https=) |
| FR (1) | FR1590291A (https=) |
| GB (1) | GB1213534A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51154569U (https=) * | 1975-06-02 | 1976-12-09 |
-
1968
- 1968-10-28 GB GB5106668A patent/GB1213534A/en not_active Expired
- 1968-10-29 FR FR1590291D patent/FR1590291A/fr not_active Expired
- 1968-10-30 DE DE19681806113 patent/DE1806113B2/de active Pending
- 1968-10-30 JP JP43078589A patent/JPS4823478B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE1806113A1 (de) | 1969-10-16 |
| FR1590291A (https=) | 1970-04-13 |
| JPS4823478B1 (https=) | 1973-07-13 |
| DE1806113B2 (de) | 1973-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Oechsner et al. | Mass spectroscopy of sputtered neutrals and its application for surface analysis | |
| US4862032A (en) | End-Hall ion source | |
| King et al. | Some new applications and techniques of molecular beams | |
| JPH06505357A (ja) | 同位体存在比プラズマ源質量分析計 | |
| US11101126B2 (en) | Method and system for measuring inert gas by ion probe | |
| Castaing et al. | Analytical microscopy by secondary ion imaging techniques | |
| Long | A theoretical assessment of the possibility of selected-area mass-spectrometric analysis using a focused ion beam | |
| Tsuji et al. | Measurement of negative‐ion‐production efficiencies and development of a dc operation sputter‐type negative ion source | |
| GB1213534A (en) | Analysis by bombardment with a beam of chemically reactive ions | |
| US4670651A (en) | Apparatus for performing the SNMS method | |
| US3508045A (en) | Analysis by bombardment with chemically reactive ions | |
| GB1398167A (en) | High pressure ion sources | |
| Darcy et al. | Design of mass spectrometers for field ionization and field desorption | |
| US3341727A (en) | Ionization gauge having a photocurrent suppressor electrode | |
| Matteson et al. | An ultra-clean microprobe ion source for atomic mass spectrometry | |
| GB849565A (en) | Ion source using a high frequency field | |
| Rüdenauer et al. | Mass and energy spectra of a capillary-type indium liquid-metal ion source | |
| GB864272A (en) | Electron gun | |
| GB1008361A (en) | Improvements in or relating to spectroscopic devices | |
| Eckstein et al. | Bombardon: an apparatus for investigating the influence of 5–20 keV ions on metal targets | |
| GB748945A (en) | Improvements in or relating to electron discharge tubes | |
| US3313936A (en) | Low energy electron diffraction apparatus having three concentric tubular focusing elctrodes | |
| Liebl | The ion microprobe-instrumentation and techniques | |
| RU2022392C1 (ru) | Источник отрицательных ионов кислорода или ионов галогенов | |
| JPS58186139A (ja) | 二重放電型イオン源 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |