GB1202617A - Improvements in or relating to scanning devices for exposing photosensitive surfaces - Google Patents

Improvements in or relating to scanning devices for exposing photosensitive surfaces

Info

Publication number
GB1202617A
GB1202617A GB25636/68A GB2563668A GB1202617A GB 1202617 A GB1202617 A GB 1202617A GB 25636/68 A GB25636/68 A GB 25636/68A GB 2563668 A GB2563668 A GB 2563668A GB 1202617 A GB1202617 A GB 1202617A
Authority
GB
United Kingdom
Prior art keywords
photo
sensitive surface
cathode ray
ray tube
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB25636/68A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gerber Systems Corp
Original Assignee
Gerber Scientific Instrument Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gerber Scientific Instrument Co filed Critical Gerber Scientific Instrument Co
Publication of GB1202617A publication Critical patent/GB1202617A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/70391—Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Projection-Type Copiers In General (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)

Abstract

1,202,617. Photographic apparatus. GERBER SCIENTIFIC INSTRUMENT CO. May 29, 1968 [Dec.22, 1967], No.25636/68. Heading G2A. A graphic design is produced by exposing a photo-sensitive surface, e.g. to produce a mask for making circuit boards or integrated circuit elements, the exposure comprising projecting light energy on to a plurality of discrete spots located along a given line, moving the line in successive passes over a photo-sensitive surface, and selectively varying the amount of light energy projected on to each of the spots as the line is moved relative to the photo-sensitive surface. In one embodiment, a cathode ray tube 38 is mounted on an X-Y plotter consisting of stepping motors 22, 34 and lead screws 20, 30, and light is focused by lens system 52 on to photo-sensitive surface 12. The cathode ray tube beam scans over an apertured mask having two rows of apertures, the apertures in one row being staggered with respect to the other row so that during scanning a continuous line may be generated. The beam is switched on or off adjacent each aperture under the control of a computer 54 and associated input device 56 such as a punched paper or magnetic tape reader. The focusing lens may be omitted and the photo-sensitive surface disposed close to the tube faceplate. The cathode ray tube may have a single beam or a multiple beam tube with associated beam switching devices may be used. In further embodiments a bundle of fibre optics is used to conduct a pattern from the faceplate of a cathode ray tube, Fig.10 (not shown), or from a plurality of light sources, Fig.8 (not shown), a lens being used to focus the end of the bundle on to the photo-sensitive surface.
GB25636/68A 1967-12-22 1968-05-29 Improvements in or relating to scanning devices for exposing photosensitive surfaces Expired GB1202617A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69298167A 1967-12-22 1967-12-22

Publications (1)

Publication Number Publication Date
GB1202617A true GB1202617A (en) 1970-08-19

Family

ID=24782842

Family Applications (1)

Application Number Title Priority Date Filing Date
GB25636/68A Expired GB1202617A (en) 1967-12-22 1968-05-29 Improvements in or relating to scanning devices for exposing photosensitive surfaces

Country Status (3)

Country Link
JP (1) JPS4912052B1 (en)
DE (1) DE1814265A1 (en)
GB (1) GB1202617A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5109476A (en) * 1990-10-15 1992-04-28 Eastman Kodak Company Color printer with synchronous and asynchronous stages
WO2001069916A1 (en) * 2000-03-15 2001-09-20 Mario Fuchs Device and method for illuminating, scanning and/or reproducing a model

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5495446U (en) * 1977-12-17 1979-07-05
NL191765C (en) * 1983-03-07 1996-07-02 Ultra Centrifuge Nederland Nv Method for etching a figure into a three-dimensional workpiece.
JP2001313251A (en) * 2000-02-21 2001-11-09 Tokyo Denki Univ Optical fiber matrix projection aligner

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5109476A (en) * 1990-10-15 1992-04-28 Eastman Kodak Company Color printer with synchronous and asynchronous stages
WO2001069916A1 (en) * 2000-03-15 2001-09-20 Mario Fuchs Device and method for illuminating, scanning and/or reproducing a model

Also Published As

Publication number Publication date
JPS4912052B1 (en) 1974-03-22
DE1814265A1 (en) 1969-10-02

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years