GB1199648A - Doping of Silicon Discs for Semi-Conductors - Google Patents

Doping of Silicon Discs for Semi-Conductors

Info

Publication number
GB1199648A
GB1199648A GB58289/67A GB5828967A GB1199648A GB 1199648 A GB1199648 A GB 1199648A GB 58289/67 A GB58289/67 A GB 58289/67A GB 5828967 A GB5828967 A GB 5828967A GB 1199648 A GB1199648 A GB 1199648A
Authority
GB
United Kingdom
Prior art keywords
discs
row
aluminium
semi
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB58289/67A
Other languages
English (en)
Inventor
Erich Gustav Spicar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB Norden Holding AB
Original Assignee
ASEA AB
Allmanna Svenska Elektriska AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASEA AB, Allmanna Svenska Elektriska AB filed Critical ASEA AB
Publication of GB1199648A publication Critical patent/GB1199648A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB58289/67A 1966-12-27 1967-12-22 Doping of Silicon Discs for Semi-Conductors Expired GB1199648A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE17730/66A SE322847B (cg-RX-API-DMAC7.html) 1966-12-27 1966-12-27

Publications (1)

Publication Number Publication Date
GB1199648A true GB1199648A (en) 1970-07-22

Family

ID=20303918

Family Applications (1)

Application Number Title Priority Date Filing Date
GB58289/67A Expired GB1199648A (en) 1966-12-27 1967-12-22 Doping of Silicon Discs for Semi-Conductors

Country Status (3)

Country Link
FR (1) FR1549051A (cg-RX-API-DMAC7.html)
GB (1) GB1199648A (cg-RX-API-DMAC7.html)
SE (1) SE322847B (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4082865A (en) * 1976-11-19 1978-04-04 Rca Corporation Method for chemical vapor deposition

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2126904B1 (cg-RX-API-DMAC7.html) * 1970-12-07 1974-04-26 Silec Semi Conducteurs

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4082865A (en) * 1976-11-19 1978-04-04 Rca Corporation Method for chemical vapor deposition

Also Published As

Publication number Publication date
FR1549051A (cg-RX-API-DMAC7.html) 1968-12-06
SE322847B (cg-RX-API-DMAC7.html) 1970-04-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees