GB1196103A - Improvements relating to Electron Guns - Google Patents

Improvements relating to Electron Guns

Info

Publication number
GB1196103A
GB1196103A GB5481/68A GB548168A GB1196103A GB 1196103 A GB1196103 A GB 1196103A GB 5481/68 A GB5481/68 A GB 5481/68A GB 548168 A GB548168 A GB 548168A GB 1196103 A GB1196103 A GB 1196103A
Authority
GB
United Kingdom
Prior art keywords
filament
light
improvements relating
electron guns
heading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5481/68A
Inventor
Kenneth Anderson
Peter Bryon Kenway
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB5481/68A priority Critical patent/GB1196103A/en
Publication of GB1196103A publication Critical patent/GB1196103A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1906—Control of temperature characterised by the use of electric means using an analogue comparing device
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/27—Control of temperature characterised by the use of electric means with sensing element responsive to radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,196,103. Automatic temperature control systems. ASSOCIATED ELECTRICAL INDUSTRIES Ltd. March 26, 1969 [Feb. 2, 1968], No. 5481/68. Heading G3R. An electron beam apparatus has a photosensitive device PD sensitive to light from a filament F reflected at M through a lens L, which device controls the filament current to maintain the filament temperature constant. The device may respond to a wide or a limited range of frequencies such as visible or infrared radiation. Preferably the light from the filament is restricted e.g. by an apertured screen S so that only light from tip region is incident on the device. The reflector M should be located below the anode in a free field space. The apparatus may be an electron microscope.
GB5481/68A 1968-02-02 1968-02-02 Improvements relating to Electron Guns Expired GB1196103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB5481/68A GB1196103A (en) 1968-02-02 1968-02-02 Improvements relating to Electron Guns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5481/68A GB1196103A (en) 1968-02-02 1968-02-02 Improvements relating to Electron Guns

Publications (1)

Publication Number Publication Date
GB1196103A true GB1196103A (en) 1970-06-24

Family

ID=9797013

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5481/68A Expired GB1196103A (en) 1968-02-02 1968-02-02 Improvements relating to Electron Guns

Country Status (1)

Country Link
GB (1) GB1196103A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998025286A1 (en) * 1996-12-02 1998-06-11 Advanced Ferrite Technology Gmbh Method and device for setting the heating power of a magnetron cathode
EP2073242A3 (en) * 2007-12-21 2010-01-13 Siemens Aktiengesellschaft Tube, especially electron tube
WO2010144267A1 (en) * 2009-06-12 2010-12-16 Carl Zeiss Nts, Llc Method and system for heating a tip apex of a charged particle source

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998025286A1 (en) * 1996-12-02 1998-06-11 Advanced Ferrite Technology Gmbh Method and device for setting the heating power of a magnetron cathode
EP2073242A3 (en) * 2007-12-21 2010-01-13 Siemens Aktiengesellschaft Tube, especially electron tube
WO2010144267A1 (en) * 2009-06-12 2010-12-16 Carl Zeiss Nts, Llc Method and system for heating a tip apex of a charged particle source
US8993981B2 (en) 2009-06-12 2015-03-31 Carl Zeiss Microscopy, Llc Charged particle source with light monitoring for tip temperature determination
TWI506665B (en) * 2009-06-12 2015-11-01 Carl Zeiss Microscopy Llc Gas field ion system, method for using a gas field ion source and method for operating a gas field ion device

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees