GB1184428A - Preparation of Ferrite Thin Films - Google Patents

Preparation of Ferrite Thin Films

Info

Publication number
GB1184428A
GB1184428A GB1267867A GB1267867A GB1184428A GB 1184428 A GB1184428 A GB 1184428A GB 1267867 A GB1267867 A GB 1267867A GB 1267867 A GB1267867 A GB 1267867A GB 1184428 A GB1184428 A GB 1184428A
Authority
GB
United Kingdom
Prior art keywords
sputtering
ferrite
ferrites
march
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1267867A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of GB1184428A publication Critical patent/GB1184428A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/06—Thin magnetic films, e.g. of one-domain structure characterised by the coupling or physical contact with connecting or interacting conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
GB1267867A 1966-03-23 1967-03-17 Preparation of Ferrite Thin Films Expired GB1184428A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR54646A FR1533195A (fr) 1966-03-23 1966-03-23 Perfectionnements apportés aux moyens pour la préparation de couches minces de ferrites

Publications (1)

Publication Number Publication Date
GB1184428A true GB1184428A (en) 1970-03-18

Family

ID=8604481

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1267867A Expired GB1184428A (en) 1966-03-23 1967-03-17 Preparation of Ferrite Thin Films

Country Status (3)

Country Link
BE (1) BE697734A (de)
FR (1) FR1533195A (de)
GB (1) GB1184428A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829969A (en) * 1969-07-28 1974-08-20 Gillette Co Cutting tool with alloy coated sharpened edge
DE2527184A1 (de) * 1975-06-18 1976-12-30 Philips Patentverwaltung Verfahren und vorrichtung zum aufbringen duenner schichten durch kathodenzerstaeubung
US4608142A (en) * 1983-11-17 1986-08-26 Nippon Sheet Glass Co., Ltd. Method of manufacturing magneto-optic recording film
US6033536A (en) * 1995-03-10 2000-03-07 Kabushiki Kaisha Toshiba Magnetron sputtering method and sputtering target

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829969A (en) * 1969-07-28 1974-08-20 Gillette Co Cutting tool with alloy coated sharpened edge
DE2527184A1 (de) * 1975-06-18 1976-12-30 Philips Patentverwaltung Verfahren und vorrichtung zum aufbringen duenner schichten durch kathodenzerstaeubung
US4608142A (en) * 1983-11-17 1986-08-26 Nippon Sheet Glass Co., Ltd. Method of manufacturing magneto-optic recording film
US6033536A (en) * 1995-03-10 2000-03-07 Kabushiki Kaisha Toshiba Magnetron sputtering method and sputtering target

Also Published As

Publication number Publication date
FR1533195A (fr) 1968-07-19
BE697734A (de) 1967-10-30

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee