FR1533195A - Perfectionnements apportés aux moyens pour la préparation de couches minces de ferrites - Google Patents

Perfectionnements apportés aux moyens pour la préparation de couches minces de ferrites

Info

Publication number
FR1533195A
FR1533195A FR54646A FR54646A FR1533195A FR 1533195 A FR1533195 A FR 1533195A FR 54646 A FR54646 A FR 54646A FR 54646 A FR54646 A FR 54646A FR 1533195 A FR1533195 A FR 1533195A
Authority
FR
France
Prior art keywords
ferrites
preparation
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR54646A
Other languages
English (en)
Inventor
Max Paulus
Charles Guillaud
Roger Morineau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR54646A priority Critical patent/FR1533195A/fr
Priority to GB1267867A priority patent/GB1184428A/en
Priority to BE697734D priority patent/BE697734A/xx
Application granted granted Critical
Publication of FR1533195A publication Critical patent/FR1533195A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/06—Thin magnetic films, e.g. of one-domain structure characterised by the coupling or physical contact with connecting or interacting conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR54646A 1966-03-23 1966-03-23 Perfectionnements apportés aux moyens pour la préparation de couches minces de ferrites Expired FR1533195A (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR54646A FR1533195A (fr) 1966-03-23 1966-03-23 Perfectionnements apportés aux moyens pour la préparation de couches minces de ferrites
GB1267867A GB1184428A (en) 1966-03-23 1967-03-17 Preparation of Ferrite Thin Films
BE697734D BE697734A (fr) 1966-03-23 1967-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR54646A FR1533195A (fr) 1966-03-23 1966-03-23 Perfectionnements apportés aux moyens pour la préparation de couches minces de ferrites

Publications (1)

Publication Number Publication Date
FR1533195A true FR1533195A (fr) 1968-07-19

Family

ID=8604481

Family Applications (1)

Application Number Title Priority Date Filing Date
FR54646A Expired FR1533195A (fr) 1966-03-23 1966-03-23 Perfectionnements apportés aux moyens pour la préparation de couches minces de ferrites

Country Status (3)

Country Link
BE (1) BE697734A (fr)
FR (1) FR1533195A (fr)
GB (1) GB1184428A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829969A (en) * 1969-07-28 1974-08-20 Gillette Co Cutting tool with alloy coated sharpened edge
DE2527184C3 (de) * 1975-06-18 1981-07-02 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zur Herstellung von Targets für Kathodenzerstäubung
US4608142A (en) * 1983-11-17 1986-08-26 Nippon Sheet Glass Co., Ltd. Method of manufacturing magneto-optic recording film
JPH08311642A (ja) * 1995-03-10 1996-11-26 Toshiba Corp マグネトロンスパッタリング法及びスパッタリングターゲット

Also Published As

Publication number Publication date
GB1184428A (en) 1970-03-18
BE697734A (fr) 1967-10-30

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