GB1145876A - Method of electrochemically etching silicon - Google Patents

Method of electrochemically etching silicon

Info

Publication number
GB1145876A
GB1145876A GB20292/66A GB2029266A GB1145876A GB 1145876 A GB1145876 A GB 1145876A GB 20292/66 A GB20292/66 A GB 20292/66A GB 2029266 A GB2029266 A GB 2029266A GB 1145876 A GB1145876 A GB 1145876A
Authority
GB
United Kingdom
Prior art keywords
silicon
ticl
organic liquid
etching silicon
methanol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB20292/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Compagnie Generale dElectricite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale dElectricite SA filed Critical Compagnie Generale dElectricite SA
Publication of GB1145876A publication Critical patent/GB1145876A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F1/00—Electrolytic cleaning, degreasing, pickling or descaling
    • C25F1/02—Pickling; Descaling
    • C25F1/12—Pickling; Descaling in melts
    • C25F1/14—Iron or steel
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/61—Electrolytic etching
    • H10P50/613—Electrolytic etching of Group IV materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
GB20292/66A 1965-05-07 1966-05-06 Method of electrochemically etching silicon Expired GB1145876A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR16295A FR1442535A (fr) 1965-05-07 1965-05-07 Procédé d'attaque sélective du silicium

Publications (1)

Publication Number Publication Date
GB1145876A true GB1145876A (en) 1969-03-19

Family

ID=8578284

Family Applications (1)

Application Number Title Priority Date Filing Date
GB20292/66A Expired GB1145876A (en) 1965-05-07 1966-05-06 Method of electrochemically etching silicon

Country Status (7)

Country Link
BE (1) BE679812A (enExample)
CH (1) CH450856A (enExample)
DE (1) DE1496764A1 (enExample)
FR (1) FR1442535A (enExample)
GB (1) GB1145876A (enExample)
LU (1) LU50965A1 (enExample)
NL (1) NL6605960A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2308786C1 (ru) * 2006-05-26 2007-10-20 Государственное образовательное учреждение высшего профессионального образования "Брянская государственная инженерно-технологическая академия" Раствор для электрохимического растворения кремния
US20090184092A1 (en) * 2005-10-28 2009-07-23 Kanto Kagaku Kabuashiki Kaisha Palladium-Selective Etching Solution and Method for Controlling Etching Selectivity
US9184364B2 (en) 2005-03-02 2015-11-10 Rosemount Inc. Pipeline thermoelectric generator assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9184364B2 (en) 2005-03-02 2015-11-10 Rosemount Inc. Pipeline thermoelectric generator assembly
US20090184092A1 (en) * 2005-10-28 2009-07-23 Kanto Kagaku Kabuashiki Kaisha Palladium-Selective Etching Solution and Method for Controlling Etching Selectivity
RU2308786C1 (ru) * 2006-05-26 2007-10-20 Государственное образовательное учреждение высшего профессионального образования "Брянская государственная инженерно-технологическая академия" Раствор для электрохимического растворения кремния

Also Published As

Publication number Publication date
DE1496764A1 (de) 1969-04-10
BE679812A (enExample) 1966-10-21
NL6605960A (enExample) 1966-11-08
FR1442535A (fr) 1966-06-17
CH450856A (fr) 1968-04-30
LU50965A1 (enExample) 1966-10-25

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