GB1139049A - Improvements in or relating to a high frequency heating system for producing a plasma by induction heating - Google Patents
Improvements in or relating to a high frequency heating system for producing a plasma by induction heatingInfo
- Publication number
- GB1139049A GB1139049A GB50129/66A GB5012966A GB1139049A GB 1139049 A GB1139049 A GB 1139049A GB 50129/66 A GB50129/66 A GB 50129/66A GB 5012966 A GB5012966 A GB 5012966A GB 1139049 A GB1139049 A GB 1139049A
- Authority
- GB
- United Kingdom
- Prior art keywords
- plasma
- producing
- relating
- high frequency
- induction heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/04—Sources of current
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
- H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Induction Heating (AREA)
- Arc Welding Control (AREA)
- Plasma Technology (AREA)
- Furnace Details (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEP0038111 | 1965-11-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1139049A true GB1139049A (en) | 1969-01-08 |
Family
ID=7375687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB50129/66A Expired GB1139049A (en) | 1965-11-12 | 1966-11-09 | Improvements in or relating to a high frequency heating system for producing a plasma by induction heating |
Country Status (8)
Country | Link |
---|---|
US (1) | US3440387A ( ) |
AT (1) | AT273330B ( ) |
BE (1) | BE689622A ( ) |
CH (1) | CH454300A ( ) |
DE (1) | DE1514322C3 ( ) |
GB (1) | GB1139049A ( ) |
NL (1) | NL6615715A ( ) |
SE (1) | SE300663B ( ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0022404A1 (fr) * | 1979-07-04 | 1981-01-14 | Instruments S.A. | Générateur de plasma |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5288971A (en) * | 1991-08-09 | 1994-02-22 | Advanced Energy Industries, Inc. | System for igniting a plasma for thin film processing |
US6633017B1 (en) | 1997-10-14 | 2003-10-14 | Advanced Energy Industries, Inc. | System for plasma ignition by fast voltage rise |
FR2778525B1 (fr) * | 1998-05-05 | 2000-07-13 | Chapel Et Cie | Procede et dispositif de traitement a haute frequence de produits et inductance et generateur a haute frequence utilises pour leur mise en oeuvre |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB667657A (en) * | 1950-04-26 | 1952-03-05 | Westinghouse Electric Int Co | Improvements in or relating to high frequency heating systems |
US2727212A (en) * | 1950-10-27 | 1955-12-13 | Westinghouse Electric Corp | Constant load voltage circuit |
BE508359A ( ) * | 1951-01-12 | |||
FR1358425A (fr) * | 1963-01-22 | 1964-04-17 | Traitements Electrolytiques & | Perfectionnement au chalumeau à plasma haute fréquence |
NL6412703A ( ) * | 1964-10-31 | 1966-05-02 | ||
US3353060A (en) * | 1964-11-28 | 1967-11-14 | Hitachi Ltd | High-frequency discharge plasma generator with an auxiliary electrode |
-
1965
- 1965-11-12 DE DE1514322A patent/DE1514322C3/de not_active Expired
-
1966
- 1966-11-08 NL NL6615715A patent/NL6615715A/xx unknown
- 1966-11-09 GB GB50129/66A patent/GB1139049A/en not_active Expired
- 1966-11-09 AT AT1035566A patent/AT273330B/de active
- 1966-11-09 SE SE15333/66A patent/SE300663B/xx unknown
- 1966-11-09 CH CH1614266A patent/CH454300A/de unknown
- 1966-11-10 BE BE689622D patent/BE689622A/xx unknown
- 1966-11-14 US US594114A patent/US3440387A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0022404A1 (fr) * | 1979-07-04 | 1981-01-14 | Instruments S.A. | Générateur de plasma |
Also Published As
Publication number | Publication date |
---|---|
DE1514322A1 (de) | 1969-09-04 |
DE1514322C3 (de) | 1974-06-06 |
SE300663B ( ) | 1968-05-06 |
CH454300A (de) | 1968-04-15 |
AT273330B (de) | 1969-08-11 |
US3440387A (en) | 1969-04-22 |
BE689622A ( ) | 1967-04-14 |
NL6615715A ( ) | 1967-05-16 |
DE1514322B2 (de) | 1973-11-15 |
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