GB1139049A - Improvements in or relating to a high frequency heating system for producing a plasma by induction heating - Google Patents

Improvements in or relating to a high frequency heating system for producing a plasma by induction heating

Info

Publication number
GB1139049A
GB1139049A GB50129/66A GB5012966A GB1139049A GB 1139049 A GB1139049 A GB 1139049A GB 50129/66 A GB50129/66 A GB 50129/66A GB 5012966 A GB5012966 A GB 5012966A GB 1139049 A GB1139049 A GB 1139049A
Authority
GB
United Kingdom
Prior art keywords
plasma
producing
relating
high frequency
induction heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB50129/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of GB1139049A publication Critical patent/GB1139049A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/04Sources of current
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/02Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/16Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
    • H05H1/18Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Induction Heating (AREA)
  • Arc Welding Control (AREA)
  • Plasma Technology (AREA)
  • Furnace Details (AREA)
  • Compositions Of Oxide Ceramics (AREA)
GB50129/66A 1965-11-12 1966-11-09 Improvements in or relating to a high frequency heating system for producing a plasma by induction heating Expired GB1139049A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEP0038111 1965-11-12

Publications (1)

Publication Number Publication Date
GB1139049A true GB1139049A (en) 1969-01-08

Family

ID=7375687

Family Applications (1)

Application Number Title Priority Date Filing Date
GB50129/66A Expired GB1139049A (en) 1965-11-12 1966-11-09 Improvements in or relating to a high frequency heating system for producing a plasma by induction heating

Country Status (8)

Country Link
US (1) US3440387A ( )
AT (1) AT273330B ( )
BE (1) BE689622A ( )
CH (1) CH454300A ( )
DE (1) DE1514322C3 ( )
GB (1) GB1139049A ( )
NL (1) NL6615715A ( )
SE (1) SE300663B ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0022404A1 (fr) * 1979-07-04 1981-01-14 Instruments S.A. Générateur de plasma

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5288971A (en) * 1991-08-09 1994-02-22 Advanced Energy Industries, Inc. System for igniting a plasma for thin film processing
US6633017B1 (en) 1997-10-14 2003-10-14 Advanced Energy Industries, Inc. System for plasma ignition by fast voltage rise
FR2778525B1 (fr) * 1998-05-05 2000-07-13 Chapel Et Cie Procede et dispositif de traitement a haute frequence de produits et inductance et generateur a haute frequence utilises pour leur mise en oeuvre

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB667657A (en) * 1950-04-26 1952-03-05 Westinghouse Electric Int Co Improvements in or relating to high frequency heating systems
US2727212A (en) * 1950-10-27 1955-12-13 Westinghouse Electric Corp Constant load voltage circuit
BE508359A ( ) * 1951-01-12
FR1358425A (fr) * 1963-01-22 1964-04-17 Traitements Electrolytiques & Perfectionnement au chalumeau à plasma haute fréquence
NL6412703A ( ) * 1964-10-31 1966-05-02
US3353060A (en) * 1964-11-28 1967-11-14 Hitachi Ltd High-frequency discharge plasma generator with an auxiliary electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0022404A1 (fr) * 1979-07-04 1981-01-14 Instruments S.A. Générateur de plasma

Also Published As

Publication number Publication date
DE1514322A1 (de) 1969-09-04
DE1514322C3 (de) 1974-06-06
SE300663B ( ) 1968-05-06
CH454300A (de) 1968-04-15
AT273330B (de) 1969-08-11
US3440387A (en) 1969-04-22
BE689622A ( ) 1967-04-14
NL6615715A ( ) 1967-05-16
DE1514322B2 (de) 1973-11-15

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