GB1093328A - Apparatus for irradiating a prismatic workpiece - Google Patents

Apparatus for irradiating a prismatic workpiece

Info

Publication number
GB1093328A
GB1093328A GB2199165A GB2199165A GB1093328A GB 1093328 A GB1093328 A GB 1093328A GB 2199165 A GB2199165 A GB 2199165A GB 2199165 A GB2199165 A GB 2199165A GB 1093328 A GB1093328 A GB 1093328A
Authority
GB
United Kingdom
Prior art keywords
wheel
tube
irradiating
division
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2199165A
Other languages
English (en)
Inventor
Francois Jacques Danie Luderus
Albert Willem De La Court
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1093328A publication Critical patent/GB1093328A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/22Exposing sequentially with the same light pattern different positions of the same surface
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/08Apparatus, e.g. for photomechanical printing surfaces
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00Photographic printing apparatus
    • G03B27/02Exposure apparatus for contact printing
    • G03B27/14Details
    • G03B27/28Edge-masking devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
GB2199165A 1965-05-24 1966-05-18 Apparatus for irradiating a prismatic workpiece Expired GB1093328A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6506544A NL138864B (nl) 1965-05-24 1965-05-24 Werkwijze en inrichting voor het belichten van een prismatisch werkstuk via patroonmaskers, en werkstuk,in het bijzonder afdrukwiel, vervaardigd met behulp van deze werkwijze.

Publications (1)

Publication Number Publication Date
GB1093328A true GB1093328A (en) 1967-11-29

Family

ID=19793210

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2199165A Expired GB1093328A (en) 1965-05-24 1966-05-18 Apparatus for irradiating a prismatic workpiece

Country Status (4)

Country Link
DE (1) DE1522489A1 (enrdf_load_html_response)
FR (1) FR1480735A (enrdf_load_html_response)
GB (1) GB1093328A (enrdf_load_html_response)
NL (1) NL138864B (enrdf_load_html_response)

Also Published As

Publication number Publication date
NL6506544A (enrdf_load_html_response) 1966-11-25
DE1522489A1 (de) 1969-08-28
FR1480735A (fr) 1967-05-12
NL138864B (nl) 1973-05-15

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