GB1085998A - Improvements in or relating to methods of vapour-depositing layers on substrates - Google Patents
Improvements in or relating to methods of vapour-depositing layers on substratesInfo
- Publication number
- GB1085998A GB1085998A GB1641866A GB1641866A GB1085998A GB 1085998 A GB1085998 A GB 1085998A GB 1641866 A GB1641866 A GB 1641866A GB 1641866 A GB1641866 A GB 1641866A GB 1085998 A GB1085998 A GB 1085998A
- Authority
- GB
- United Kingdom
- Prior art keywords
- vapour
- components
- containers
- depositing layers
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Abstract
In a method of vapour depositing layers containing two or more components having different vapour pressures at the same temperatures, on a substrate in vacuo or at low gas pressure, the components are simultaneously vapourized from separate containers at the same temperature, the dimensions of the exit apertures of the containers being such as to determine the proportions of the components deposited. The examples disclose (1) the deposition of Zn and Te on glass which may be heated during deposition in which case zinc telluride is formed; (2) ZnS and Mn on glass and (3) Cr-Ni on an unspecified substrate. The containers may be cylindrical and arranged coaxially with one partly in the other and the heating may be effected with infrared radiation on H.F. current.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6504932A NL6504932A (en) | 1965-04-17 | 1965-04-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1085998A true GB1085998A (en) | 1967-10-04 |
Family
ID=19792962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1641866A Expired GB1085998A (en) | 1965-04-17 | 1966-04-14 | Improvements in or relating to methods of vapour-depositing layers on substrates |
Country Status (6)
Country | Link |
---|---|
AT (1) | AT267107B (en) |
BE (1) | BE679635A (en) |
CH (1) | CH469815A (en) |
DE (1) | DE1521424A1 (en) |
GB (1) | GB1085998A (en) |
NL (1) | NL6504932A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2230792A (en) * | 1989-04-21 | 1990-10-31 | Secr Defence | Multiple source physical vapour deposition. |
-
1965
- 1965-04-17 NL NL6504932A patent/NL6504932A/xx unknown
-
1966
- 1966-04-14 GB GB1641866A patent/GB1085998A/en not_active Expired
- 1966-04-14 DE DE19661521424 patent/DE1521424A1/en active Pending
- 1966-04-14 AT AT352066A patent/AT267107B/en active
- 1966-04-14 CH CH537766A patent/CH469815A/en unknown
- 1966-04-15 BE BE679635D patent/BE679635A/xx unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2230792A (en) * | 1989-04-21 | 1990-10-31 | Secr Defence | Multiple source physical vapour deposition. |
GB2248457B (en) * | 1989-04-21 | 1993-05-05 | Secr Defence | Multiple source evaporation for bulk alloy production |
Also Published As
Publication number | Publication date |
---|---|
DE1521424A1 (en) | 1969-08-21 |
CH469815A (en) | 1969-03-15 |
BE679635A (en) | 1966-10-17 |
NL6504932A (en) | 1966-10-18 |
AT267107B (en) | 1968-12-10 |
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