GB1085998A - Improvements in or relating to methods of vapour-depositing layers on substrates - Google Patents

Improvements in or relating to methods of vapour-depositing layers on substrates

Info

Publication number
GB1085998A
GB1085998A GB1641866A GB1641866A GB1085998A GB 1085998 A GB1085998 A GB 1085998A GB 1641866 A GB1641866 A GB 1641866A GB 1641866 A GB1641866 A GB 1641866A GB 1085998 A GB1085998 A GB 1085998A
Authority
GB
United Kingdom
Prior art keywords
vapour
components
containers
depositing layers
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1641866A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1085998A publication Critical patent/GB1085998A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Abstract

In a method of vapour depositing layers containing two or more components having different vapour pressures at the same temperatures, on a substrate in vacuo or at low gas pressure, the components are simultaneously vapourized from separate containers at the same temperature, the dimensions of the exit apertures of the containers being such as to determine the proportions of the components deposited. The examples disclose (1) the deposition of Zn and Te on glass which may be heated during deposition in which case zinc telluride is formed; (2) ZnS and Mn on glass and (3) Cr-Ni on an unspecified substrate. The containers may be cylindrical and arranged coaxially with one partly in the other and the heating may be effected with infrared radiation on H.F. current.
GB1641866A 1965-04-17 1966-04-14 Improvements in or relating to methods of vapour-depositing layers on substrates Expired GB1085998A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6504932A NL6504932A (en) 1965-04-17 1965-04-17

Publications (1)

Publication Number Publication Date
GB1085998A true GB1085998A (en) 1967-10-04

Family

ID=19792962

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1641866A Expired GB1085998A (en) 1965-04-17 1966-04-14 Improvements in or relating to methods of vapour-depositing layers on substrates

Country Status (6)

Country Link
AT (1) AT267107B (en)
BE (1) BE679635A (en)
CH (1) CH469815A (en)
DE (1) DE1521424A1 (en)
GB (1) GB1085998A (en)
NL (1) NL6504932A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2230792A (en) * 1989-04-21 1990-10-31 Secr Defence Multiple source physical vapour deposition.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2230792A (en) * 1989-04-21 1990-10-31 Secr Defence Multiple source physical vapour deposition.
GB2248457B (en) * 1989-04-21 1993-05-05 Secr Defence Multiple source evaporation for bulk alloy production

Also Published As

Publication number Publication date
DE1521424A1 (en) 1969-08-21
CH469815A (en) 1969-03-15
BE679635A (en) 1966-10-17
NL6504932A (en) 1966-10-18
AT267107B (en) 1968-12-10

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