GB1073339A - Cathode assemblies for electron discharge devices - Google Patents
Cathode assemblies for electron discharge devicesInfo
- Publication number
- GB1073339A GB1073339A GB32810/65A GB3281065A GB1073339A GB 1073339 A GB1073339 A GB 1073339A GB 32810/65 A GB32810/65 A GB 32810/65A GB 3281065 A GB3281065 A GB 3281065A GB 1073339 A GB1073339 A GB 1073339A
- Authority
- GB
- United Kingdom
- Prior art keywords
- wire
- coating
- al2o3
- carrier gas
- vaporized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
- H01J1/22—Heaters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2933—Coated or with bond, impregnation or core
- Y10T428/294—Coated or with bond, impregnation or core including metal or compound thereof [excluding glass, ceramic and asbestos]
- Y10T428/2958—Metal or metal compound in coating
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
A coating of Al2O3, BeO, or Y2O3 is formed on a refractory metal wire constituting a cathode heater element (see Division H1) by deposition from a vaporized compound or compounds other than the oxide, thermal decomposition or chemical reaction occurring at the metal surface. In an example, AlCl3 is vaporized and carried, in a controlled mixture of H2 and CO2 at atmospheric pressure, over the wire, which is heated by the passage of current therethrough to a temperature in the range 850 DEG to 1325 DEG C., to produce the reaction 2AlCl3 + 3H2 + 3CO2 --> Al2O3 + 6HCl + 3CO The wire may be of W, Ta, Mo, Re, Pt, Pd, Rh, Os, Ru, Ir, or an alloy thereof. The use of BeCl2 or YCl3 for the preparation of the relevant oxide coating, and the additional presence in the carrier gas of CO, N2 and A, are referred to. Quantitative data concerning carrier gas composition and rate of flow, and deposition time and coating thickness, are given.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US399461A US3372297A (en) | 1964-09-28 | 1964-09-28 | High frequency electron discharge devices and thermionic cathodes having improved (cvd) refractory insulation coated heater wires |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1073339A true GB1073339A (en) | 1967-06-21 |
Family
ID=23579590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB32810/65A Expired GB1073339A (en) | 1964-09-28 | 1965-07-30 | Cathode assemblies for electron discharge devices |
Country Status (2)
Country | Link |
---|---|
US (1) | US3372297A (en) |
GB (1) | GB1073339A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3894164A (en) * | 1973-03-15 | 1975-07-08 | Rca Corp | Chemical vapor deposition of luminescent films |
DE2317446C3 (en) * | 1973-04-06 | 1983-11-10 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Method of manufacturing a heating element for an indirectly heated cathode |
US3984587A (en) * | 1973-07-23 | 1976-10-05 | Rca Corporation | Chemical vapor deposition of luminescent films |
US3919581A (en) * | 1974-07-12 | 1975-11-11 | Gen Electric | Thoria-yttria emission mixture for discharge lamps |
US5041041A (en) * | 1986-12-22 | 1991-08-20 | Gte Products Corporation | Method of fabricating a composite lamp filament |
US7575039B2 (en) * | 2003-10-15 | 2009-08-18 | United Technologies Corporation | Refractory metal core coatings |
KR101372841B1 (en) * | 2012-04-30 | 2014-03-13 | 한국에너지기술연구원 | Composite synthesis instrument, composite synthesis method, vaporizer and complex using co-vaporization |
JP2017107816A (en) | 2015-12-11 | 2017-06-15 | 株式会社堀場エステック | Filament for thermal electron emission, quadrupole mass spectrometer, and method for analyzing residual gas |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2700626A (en) * | 1949-12-09 | 1955-01-25 | Bell Telephone Labor Inc | Secondary electron emissive electrodes |
US2665998A (en) * | 1950-03-18 | 1954-01-12 | Fansteel Metallurgical Corp | Method of preparing highly refractory bodies |
US2817784A (en) * | 1951-01-31 | 1957-12-24 | Siemens Ag | Cathode for use in electrical discharge devices |
BE512449A (en) * | 1955-03-28 | 1900-01-01 | ||
US2991391A (en) * | 1957-07-24 | 1961-07-04 | Varian Associates | Electron beam discharge apparatus |
US3029360A (en) * | 1958-04-29 | 1962-04-10 | Rca Corp | Heater wire coating process |
US3178308A (en) * | 1960-09-07 | 1965-04-13 | Pfaudler Permutit Inc | Chemical vapor plating process |
US3251337A (en) * | 1963-07-16 | 1966-05-17 | Robert E Latta | Spiral fluidized bed device and method for coating particles |
-
1964
- 1964-09-28 US US399461A patent/US3372297A/en not_active Expired - Lifetime
-
1965
- 1965-07-30 GB GB32810/65A patent/GB1073339A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3372297A (en) | 1968-03-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3356527A (en) | Vapor-plating metals from fluorocarbon keto metal compounds | |
US3594216A (en) | Vapor phase deposition of metal from a metal-organic beta-ketoamine chelate | |
US5173327A (en) | LPCVD process for depositing titanium films for semiconductor devices | |
TW511159B (en) | Method for forming thin film and apparatus for forming thin film | |
Hämäläinen et al. | Low temperature atomic layer deposition of noble metals using ozone and molecular hydrogen as reactants | |
GB1073339A (en) | Cathode assemblies for electron discharge devices | |
WO2000012776A1 (en) | Precursor chemistries for chemical vapor deposition of ruthenium and ruthenium oxide | |
JP2009084625A (en) | Raw material gas supply system and film deposition apparatus | |
US4415420A (en) | Cubic boron nitride preparation | |
GB1055994A (en) | Improvements relating to porous bodies coated with metal | |
US3399980A (en) | Metallic carbides and a process of producing the same | |
Keulks et al. | Infrared spectroscopic study of carbon monoxide adsorption on hydrogen and oxygen treated silver surfaces | |
JP4661130B2 (en) | Chemical vapor deposition method | |
KR20160101697A (en) | Aluminum compound and forming method of aluminum-containing film using the same | |
US2831784A (en) | Gastinger | |
US5858476A (en) | Method and apparatus for making and depositing compounds | |
US20140231930A1 (en) | Atomic Layer Deposition of Hafnium or Zirconium Alloy Films | |
KR100353510B1 (en) | system for metal organic chemical vapor deposition | |
US3703405A (en) | Vapor deposition of rhenium and rhenium-tungsten alloy coatings | |
US3658572A (en) | Pyrolytic coatings of molybdenum sulfide by plasma jet technique | |
EP2520690A1 (en) | Ruthenium complex mixture, method for producing same, composition for forming film, ruthenium-containing film and method for producing same | |
WO2020129616A1 (en) | Raw material for forming thin film for atomic layer deposition, production method of thin film, and alkoxide compound | |
US3501337A (en) | Tungsten seal coat | |
Joshi et al. | A light effect in chlorine under electrical discharge | |
US3310375A (en) | Method of forming a sheet |