GB1052029A - - Google Patents

Info

Publication number
GB1052029A
GB1052029A GB1052029DA GB1052029A GB 1052029 A GB1052029 A GB 1052029A GB 1052029D A GB1052029D A GB 1052029DA GB 1052029 A GB1052029 A GB 1052029A
Authority
GB
United Kingdom
Prior art keywords
film
oxygen
silicon
sept
priming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of GB1052029A publication Critical patent/GB1052029A/en
Active legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/0029—Processes of manufacture
    • H01G9/0032—Processes of manufacture formation of the dielectric layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Abstract

1,052,029. Oxidizing a silicon surface. ARTHUR D. LITTLE Inc. Sept. 16, 1963 [Sept. 20, 1962; April 12, 1963], No. 36315/63. Heading C1A. [Also in Divisions C7 and H1] A resistive barrier film of silicon oxides is formed by producing a priming barrier film on a body of silicon by reacting oxygen therewith, exposing the priming film to negatively charged ions of oxygen, and during exposure to said oxygen providing an electric potential across the film to produce a thicker film. The electric potential may be provided either by an electrode 28 (Fig. 1) or merely by the presence of the negative ions (see Fig. 4, not shown).
GB1052029D 1962-09-20 Active GB1052029A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22510062A 1962-09-20 1962-09-20
US654009A US3394066A (en) 1962-09-20 1967-07-17 Method of anodizing by applying a positive potential to a body immersed in a plasma

Publications (1)

Publication Number Publication Date
GB1052029A true GB1052029A (en)

Family

ID=26919299

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1052029D Active GB1052029A (en) 1962-09-20

Country Status (3)

Country Link
US (1) US3394066A (en)
GB (1) GB1052029A (en)
NL (1) NL298098A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3436327A (en) * 1966-07-18 1969-04-01 Collins Radio Co Selective sputtering rate circuit forming process
US3673071A (en) * 1968-08-08 1972-06-27 Texas Instruments Inc Process for preparation of tunneling barriers
US3658672A (en) * 1970-12-01 1972-04-25 Rca Corp Method of detecting the completion of plasma anodization of a metal on a semiconductor body
US3863074A (en) * 1972-08-30 1975-01-28 Ibm Low temperature plasma anodization apparatus
US3962988A (en) * 1973-03-05 1976-06-15 Yoichi Murayama, Nippon Electric Varian Ltd. Ion-plating apparatus having an h.f. electrode for providing an h.f. glow discharge region
LU69164A1 (en) * 1974-01-15 1974-04-08
JPS5413979B2 (en) * 1975-01-23 1979-06-04
US4183781A (en) * 1978-09-25 1980-01-15 International Business Machines Corporation Stabilization process for aluminum microcircuits which have been reactive-ion etched
US4323589A (en) * 1980-05-07 1982-04-06 International Business Machines Corporation Plasma oxidation
FR2648478B1 (en) * 1989-06-15 1993-06-11 Siderurgie Fse Inst Rech PROCESS FOR COLORING THE SURFACE OF METAL MATERIALS AND PRODUCTS OBTAINED BY ITS IMPLEMENTATION
US5785838A (en) * 1993-02-26 1998-07-28 Nikon Corporation By Hiroyuki Sugimura Method for producing an oxide film
US5391281A (en) * 1993-04-09 1995-02-21 Materials Research Corp. Plasma shaping plug for control of sputter etching
FR2741361B3 (en) * 1995-11-22 1998-04-17 Balzers Hochvakuum PROCESS FOR THERMOCHEMICAL SURFACE TREATMENT BY IMMERSION IN PLASMA, PLANT FOR THIS PROCESS, USES AND PARTS OBTAINED
US7557362B2 (en) * 2004-02-04 2009-07-07 Veeco Instruments Inc. Ion sources and methods for generating an ion beam with a controllable ion current density distribution
US8158016B2 (en) * 2004-02-04 2012-04-17 Veeco Instruments, Inc. Methods of operating an electromagnet of an ion source
US10077717B2 (en) 2014-10-01 2018-09-18 Rolls-Royce Corporation Corrosion and abrasion resistant coating

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2346483A (en) * 1942-08-07 1944-04-11 Gen Electric Chargeproof cover glass
CH291362A (en) * 1950-08-03 1953-06-15 Berghaus Elektrophysik Anst Method and device for carrying out technical processes by means of gas discharges, which are connected with a cathodeic material atomization.
NL178001B (en) * 1953-02-17 Scm Corp PROCESS FOR DESULFURIZATION OF HYDROCARBON-TERPENTINE FRACTIONS BY CARBON SORPTION.
US3077444A (en) * 1956-06-13 1963-02-12 Siegfried R Hoh Laminated magnetic materials and methods
US3108900A (en) * 1959-04-13 1963-10-29 Cornelius A Papp Apparatus and process for producing coatings on metals

Also Published As

Publication number Publication date
NL298098A (en)
US3394066A (en) 1968-07-23

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