Classifications

• • H—ELECTRICITY
  • H04—ELECTRIC COMMUNICATION TECHNIQUE
  • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
  • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
  • H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
  • G01L1/00—Measuring force or stress, in general
  • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
  • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
  • H10P50/60—Wet etching
  • H10P50/64—Wet etching of semiconductor materials
  • H10P50/642—Chemical etching
  • H10P50/644—Anisotropic liquid etching
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Acoustics & Sound (AREA)
• Signal Processing (AREA)
• Pressure Sensors (AREA)
• Transducers For Ultrasonic Waves (AREA)
• Measuring Fluid Pressure (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=26953315

Family Applications (2)

Family Applications After (1)

Country Status (4)

Cited By (1)

Family Cites Families (2)

• 0
  • NL NL133019D patent/NL133019C/xx active
• 1964
  • 1964-02-24 GB GB7628/64A patent/GB1045934A/en not_active Expired
  • 1964-03-07 DE DER37398A patent/DE1256443B/de active Pending
  • 1964-03-23 NL NL6403085A patent/NL6403085A/xx unknown
  • 1964-03-25 SE SE3772/64A patent/SE306562B/xx unknown
  • 1964-09-02 GB GB35938/64A patent/GB1056390A/en not_active Expired
  • 1964-09-24 NL NL6411143A patent/NL6411143A/xx unknown
  • 1964-09-26 DE DE19641441853 patent/DE1441853A1/de active Pending
  • 1964-09-29 SE SE11699/64A patent/SE308031B/xx unknown

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