GB1024598A - Interferometric inspection apparatus - Google Patents

Interferometric inspection apparatus

Info

Publication number
GB1024598A
GB1024598A GB35235/64A GB3523564A GB1024598A GB 1024598 A GB1024598 A GB 1024598A GB 35235/64 A GB35235/64 A GB 35235/64A GB 3523564 A GB3523564 A GB 3523564A GB 1024598 A GB1024598 A GB 1024598A
Authority
GB
United Kingdom
Prior art keywords
mirror
film
light
thickness
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35235/64A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23178262&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=GB1024598(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of GB1024598A publication Critical patent/GB1024598A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
    • G02F2/002—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light using optical mixing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GB35235/64A 1963-08-27 1964-08-27 Interferometric inspection apparatus Expired GB1024598A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US304849A US3319515A (en) 1963-08-27 1963-08-27 Interferometric optical phase discrimination apparatus

Publications (1)

Publication Number Publication Date
GB1024598A true GB1024598A (en) 1966-03-30

Family

ID=23178262

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35235/64A Expired GB1024598A (en) 1963-08-27 1964-08-27 Interferometric inspection apparatus

Country Status (4)

Country Link
US (1) US3319515A (enrdf_load_stackoverflow)
DE (1) DE1447253B2 (enrdf_load_stackoverflow)
GB (1) GB1024598A (enrdf_load_stackoverflow)
LU (1) LU46837A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109709073A (zh) * 2019-01-10 2019-05-03 金华伏安光电科技有限公司 一种纳米小球膜层数检测装置

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3492491A (en) * 1967-03-03 1970-01-27 Optomechanisms Inc Thickness monitor for coating silicon wafer
FR2070474A5 (enrdf_load_stackoverflow) * 1969-12-05 1971-09-10 Anvar
US3720471A (en) * 1970-02-25 1973-03-13 Jeol Ltd Method for measuring plate thickness
US4309109A (en) * 1972-05-25 1982-01-05 The United States Of America As Represented By The Secretary Of The Navy Pulsed interferometric remote gauge
US3930167A (en) * 1973-05-04 1975-12-30 Univ Minnesota In-line production control of polymeric film
DE2457253C2 (de) * 1974-12-04 1982-09-02 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
US4105335A (en) * 1975-06-28 1978-08-08 Canon Kabushiki Kaisha Interferometric optical phase discrimination apparatus
US4072422A (en) * 1975-10-27 1978-02-07 Canon Kabushiki Kaisha Apparatus for interferometrically measuring the physical properties of test object
DE2709686C2 (de) * 1977-03-05 1982-09-09 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
US4355903A (en) * 1980-02-08 1982-10-26 Rca Corporation Thin film thickness monitor
GB2106736B (en) * 1981-09-03 1985-06-12 Standard Telephones Cables Ltd Optical transmission system
FI823028A0 (fi) * 1982-09-01 1982-09-01 Kalevi Juhani Kalliomaeki Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer
US4958930A (en) * 1985-12-11 1990-09-25 E. I. Du Pont De Nemours And Company Apparatus for monitoring thickness variations in a film web
US4842410A (en) * 1986-10-24 1989-06-27 Geo-Centers, Inc. Apparatus and method utilizing interference fringes to determine the thermal stability of a liquid
JPS6453101A (en) * 1987-05-25 1989-03-01 Kurashiki Boseki Kk Equal tilt angle interference type film thickness gauge
US4844614A (en) * 1987-09-01 1989-07-04 Nicolet Instrument Corporation Interchangeable beam splitting holder and compartment therefor
DE69033111T2 (de) * 1989-09-25 1999-09-09 Jasco Corp. Apparat und Verfahren für die Ausmessung von dünnen mehrschichtigen Lagen
US5473432A (en) * 1994-09-12 1995-12-05 Hewlett-Packard Company Apparatus for measuring the thickness of a moving film utilizing an adjustable numerical aperture lens
US5659392A (en) * 1995-03-22 1997-08-19 Eastman Kodak Company Associated dual interferometric measurement apparatus for determining a physical property of an object
US5596409A (en) * 1995-03-22 1997-01-21 Eastman Kodak Company Associated dual interferometric measurement method for determining a physical property of an object
US6067161A (en) * 1998-10-29 2000-05-23 Eastman Kodak Company Apparatus for measuring material thickness profiles
US6034772A (en) * 1998-10-29 2000-03-07 Eastman Kodak Company Method for processing interferometric measurement data
US6038027A (en) * 1998-10-29 2000-03-14 Eastman Kodak Company Method for measuring material thickness profiles
US6470294B1 (en) * 1999-04-13 2002-10-22 Qualitek-Vib, Inc. System and method for the on-line measurement of glue application rate on a corrugator
US6614534B1 (en) 1999-12-14 2003-09-02 Eastman Kodak Company Method and apparatus for combined measurement of surface non-uniformity index of refraction variation and thickness variation
US6724487B2 (en) 2002-06-06 2004-04-20 Eastman Kodak Company Apparatus and method for measuring digital imager, package and wafer bow and deviation from flatness
DE102009025562A1 (de) * 2008-10-20 2010-04-29 Siemens Aktiengesellschaft Verfahren zum optischen Untersuchen von Schichten
US9581433B2 (en) * 2013-12-11 2017-02-28 Honeywell Asca Inc. Caliper sensor and method using mid-infrared interferometry
US20150253127A1 (en) * 2014-03-04 2015-09-10 Honeywell Asca Inc. Thickness Determination of Web Product by Mid-infrared Wavelength Scanning Interferometry
CN109459416B (zh) * 2018-11-07 2023-12-22 天津大学 基于反射窗口提高太赫兹波成像信噪比的装置及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2518647A (en) * 1948-01-07 1950-08-15 Celanese Corp Interferometer means for thickness measurements
US3202052A (en) * 1962-01-12 1965-08-24 Werner R Rambauske Interferometer used with piezoelectric crystal to form light valve
US3238839A (en) * 1962-03-29 1966-03-08 Gen Electric Optical thickness gauge

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109709073A (zh) * 2019-01-10 2019-05-03 金华伏安光电科技有限公司 一种纳米小球膜层数检测装置
CN109709073B (zh) * 2019-01-10 2021-10-22 苏州市东挺河智能科技发展有限公司 一种纳米小球膜层数检测装置

Also Published As

Publication number Publication date
LU46837A1 (enrdf_load_stackoverflow) 1966-02-28
DE1447253A1 (de) 1969-02-06
US3319515A (en) 1967-05-16
DE1447253B2 (de) 1972-04-06

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