GB1001761A - Methods of producing silicon films on semiconductor substrates - Google Patents

Methods of producing silicon films on semiconductor substrates

Info

Publication number
GB1001761A
GB1001761A GB1575/63A GB157563A GB1001761A GB 1001761 A GB1001761 A GB 1001761A GB 1575/63 A GB1575/63 A GB 1575/63A GB 157563 A GB157563 A GB 157563A GB 1001761 A GB1001761 A GB 1001761A
Authority
GB
United Kingdom
Prior art keywords
silicon
substrate
vac
pump
transfer body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1575/63A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1001761A publication Critical patent/GB1001761A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02658—Pretreatments

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
GB1575/63A 1962-06-19 1963-01-14 Methods of producing silicon films on semiconductor substrates Expired GB1001761A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20351462A 1962-06-19 1962-06-19

Publications (1)

Publication Number Publication Date
GB1001761A true GB1001761A (en) 1965-08-18

Family

ID=22754303

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1575/63A Expired GB1001761A (en) 1962-06-19 1963-01-14 Methods of producing silicon films on semiconductor substrates

Country Status (3)

Country Link
GB (1) GB1001761A (enrdf_load_stackoverflow)
NL (1) NL291134A (enrdf_load_stackoverflow)
SE (1) SE219036C1 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
SE219036C1 (enrdf_load_stackoverflow) 1968-02-20
NL291134A (enrdf_load_stackoverflow)

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