GB0920511D0 - Mems device and method of fabrication - Google Patents

Mems device and method of fabrication

Info

Publication number
GB0920511D0
GB0920511D0 GB0920511A GB0920511A GB0920511D0 GB 0920511 D0 GB0920511 D0 GB 0920511D0 GB 0920511 A GB0920511 A GB 0920511A GB 0920511 A GB0920511 A GB 0920511A GB 0920511 D0 GB0920511 D0 GB 0920511D0
Authority
GB
United Kingdom
Prior art keywords
fabrication
mems device
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0920511A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems PLC
Original Assignee
BAE Systems PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BAE Systems PLC filed Critical BAE Systems PLC
Priority to GB0920511A priority Critical patent/GB0920511D0/en
Publication of GB0920511D0 publication Critical patent/GB0920511D0/en
Priority to EP10787532.0A priority patent/EP2504274B1/en
Priority to PCT/GB2010/051939 priority patent/WO2011064569A1/en
Ceased legal-status Critical Current

Links

GB0920511A 2009-11-24 2009-11-24 Mems device and method of fabrication Ceased GB0920511D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0920511A GB0920511D0 (en) 2009-11-24 2009-11-24 Mems device and method of fabrication
EP10787532.0A EP2504274B1 (en) 2009-11-24 2010-11-22 Mems device and method of fabrication
PCT/GB2010/051939 WO2011064569A1 (en) 2009-11-24 2010-11-22 Mems device and method of fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0920511A GB0920511D0 (en) 2009-11-24 2009-11-24 Mems device and method of fabrication

Publications (1)

Publication Number Publication Date
GB0920511D0 true GB0920511D0 (en) 2010-01-06

Family

ID=41565742

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0920511A Ceased GB0920511D0 (en) 2009-11-24 2009-11-24 Mems device and method of fabrication

Country Status (1)

Country Link
GB (1) GB0920511D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)