GB0805473D0 - Method and article - Google Patents

Method and article

Info

Publication number
GB0805473D0
GB0805473D0 GBGB0805473.6A GB0805473A GB0805473D0 GB 0805473 D0 GB0805473 D0 GB 0805473D0 GB 0805473 A GB0805473 A GB 0805473A GB 0805473 D0 GB0805473 D0 GB 0805473D0
Authority
GB
United Kingdom
Prior art keywords
article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0805473.6A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Graphene Industries Ltd
Original Assignee
Graphene Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Graphene Industries Ltd filed Critical Graphene Industries Ltd
Priority to GBGB0805473.6A priority Critical patent/GB0805473D0/en
Publication of GB0805473D0 publication Critical patent/GB0805473D0/en
Priority to PCT/GB2009/050295 priority patent/WO2009118564A2/en
Priority to EP09725833A priority patent/EP2265544A2/en
Priority to KR1020107023824A priority patent/KR101587224B1/ko
Priority to JP2011501301A priority patent/JP5576356B2/ja
Priority to US12/934,325 priority patent/US8778208B2/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Laminated Bodies (AREA)
  • Moulding By Coating Moulds (AREA)
  • Physical Vapour Deposition (AREA)
GBGB0805473.6A 2008-03-26 2008-03-26 Method and article Ceased GB0805473D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GBGB0805473.6A GB0805473D0 (en) 2008-03-26 2008-03-26 Method and article
PCT/GB2009/050295 WO2009118564A2 (en) 2008-03-26 2009-03-26 Method and article
EP09725833A EP2265544A2 (en) 2008-03-26 2009-03-26 Method of forming an ultra-thin sheet suspended on a support member
KR1020107023824A KR101587224B1 (ko) 2008-03-26 2009-03-26 지지 부재상에 매달린 초박형 시이트의 형성 방법
JP2011501301A JP5576356B2 (ja) 2008-03-26 2009-03-26 支持部材に懸垂された超薄型シートを形成する方法
US12/934,325 US8778208B2 (en) 2008-03-26 2009-03-26 Method and article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0805473.6A GB0805473D0 (en) 2008-03-26 2008-03-26 Method and article

Publications (1)

Publication Number Publication Date
GB0805473D0 true GB0805473D0 (en) 2008-04-30

Family

ID=39386763

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0805473.6A Ceased GB0805473D0 (en) 2008-03-26 2008-03-26 Method and article

Country Status (6)

Country Link
US (1) US8778208B2 (enExample)
EP (1) EP2265544A2 (enExample)
JP (1) JP5576356B2 (enExample)
KR (1) KR101587224B1 (enExample)
GB (1) GB0805473D0 (enExample)
WO (1) WO2009118564A2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102315058B (zh) * 2010-07-07 2013-12-11 清华大学 透射电镜微栅及其制备方法
US8617395B2 (en) * 2010-09-30 2013-12-31 The United States Of America, As Represented By The Secretary Of Agriculture Thin film composite membranes and their method of preparation and use
WO2013109446A1 (en) * 2012-01-18 2013-07-25 The Trustees Of Columbia University In The City Of New York Optoelectronic devices and methods of fabricating same
KR101638060B1 (ko) * 2012-01-26 2016-07-08 엠파이어 테크놀로지 디벨롭먼트 엘엘씨 주기적인 옹스트롬 단위의 구멍을 갖는 그래핀 멤브레인
EP2626884A1 (en) * 2012-02-10 2013-08-14 Danmarks Tekniske Universitet - DTU Microfluidic chip for high resolution transmission electron microscopy
WO2014018030A1 (en) 2012-07-25 2014-01-30 Empire Technology Development Llc Repairing graphene on a porous support
US9156702B2 (en) 2012-07-25 2015-10-13 Empire Technology Development Llc Graphene membrane repair
DE102013106353B4 (de) * 2013-06-18 2018-06-28 Tdk Corporation Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement
US9353037B2 (en) * 2013-11-19 2016-05-31 The Research Foundation For The State University Of New York Graphene oxide-based composite membranes
KR20160099601A (ko) * 2013-12-23 2016-08-22 생-고뱅 퍼포먼스 플라스틱스 코포레이션 코팅재 및 저 탁도 열 차단 복합체
US9711647B2 (en) * 2014-06-13 2017-07-18 Taiwan Semiconductor Manufacturing Company, Ltd. Thin-sheet FinFET device
KR101989985B1 (ko) 2017-09-18 2019-06-18 한국과학기술연구원 자유지지형 박막의 제조 방법
KR102838260B1 (ko) * 2023-05-04 2025-07-24 주식회사 참그래핀 보강된 2차원 소재 멤브레인 구조체의 제조방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003305739A (ja) * 2002-04-12 2003-10-28 Audio Technica Corp 振動膜用高分子フィルムの製造方法および振動膜ユニットの作製方法
US7989067B2 (en) * 2003-06-12 2011-08-02 Georgia Tech Research Corporation Incorporation of functionalizing molecules in nanopatterned epitaxial graphene electronics
DK2153461T3 (en) 2007-05-09 2015-07-13 Protochips Inc Microscopy Support structures
US8409450B2 (en) * 2008-03-24 2013-04-02 The Regents Of The University Of California Graphene-based structure, method of suspending graphene membrane, and method of depositing material onto graphene membrane

Also Published As

Publication number Publication date
JP2011520212A (ja) 2011-07-14
KR20100127850A (ko) 2010-12-06
EP2265544A2 (en) 2010-12-29
KR101587224B1 (ko) 2016-01-20
JP5576356B2 (ja) 2014-08-20
WO2009118564A2 (en) 2009-10-01
WO2009118564A3 (en) 2010-06-10
US8778208B2 (en) 2014-07-15
US20110017390A1 (en) 2011-01-27

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)