GB0710335D0 - A method of filling trenches on a substrate - Google Patents

A method of filling trenches on a substrate

Info

Publication number
GB0710335D0
GB0710335D0 GB0710335A GB0710335A GB0710335D0 GB 0710335 D0 GB0710335 D0 GB 0710335D0 GB 0710335 A GB0710335 A GB 0710335A GB 0710335 A GB0710335 A GB 0710335A GB 0710335 D0 GB0710335 D0 GB 0710335D0
Authority
GB
United Kingdom
Prior art keywords
substrate
filling trenches
trenches
filling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0710335A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0710335A priority Critical patent/GB0710335D0/en
Publication of GB0710335D0 publication Critical patent/GB0710335D0/en
Priority to PCT/GB2008/000961 priority patent/WO2008145946A1/en
Ceased legal-status Critical Current

Links

GB0710335A 2007-05-31 2007-05-31 A method of filling trenches on a substrate Ceased GB0710335D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0710335A GB0710335D0 (en) 2007-05-31 2007-05-31 A method of filling trenches on a substrate
PCT/GB2008/000961 WO2008145946A1 (en) 2007-05-31 2008-03-18 A method of filling trenches on a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0710335A GB0710335D0 (en) 2007-05-31 2007-05-31 A method of filling trenches on a substrate

Publications (1)

Publication Number Publication Date
GB0710335D0 true GB0710335D0 (en) 2007-07-11

Family

ID=38289558

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0710335A Ceased GB0710335D0 (en) 2007-05-31 2007-05-31 A method of filling trenches on a substrate

Country Status (2)

Country Link
GB (1) GB0710335D0 (en)
WO (1) WO2008145946A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100354439B1 (en) * 2000-12-08 2002-09-28 삼성전자 주식회사 Method of forming trench type isolation layer
KR100428805B1 (en) * 2001-08-09 2004-04-28 삼성전자주식회사 Structure of Trench Isolation and Method of Forming The Same
JP2005166700A (en) * 2003-11-28 2005-06-23 Toshiba Corp Semiconductor device and manufacturing method therefor
US7332408B2 (en) * 2004-06-28 2008-02-19 Micron Technology, Inc. Isolation trenches for memory devices

Also Published As

Publication number Publication date
WO2008145946A1 (en) 2008-12-04

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)