GB0614501D0 - Ion sources - Google Patents

Ion sources

Info

Publication number
GB0614501D0
GB0614501D0 GB0614501A GB0614501A GB0614501D0 GB 0614501 D0 GB0614501 D0 GB 0614501D0 GB 0614501 A GB0614501 A GB 0614501A GB 0614501 A GB0614501 A GB 0614501A GB 0614501 D0 GB0614501 D0 GB 0614501D0
Authority
GB
United Kingdom
Prior art keywords
ion sources
sources
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0614501A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0614501A priority Critical patent/GB0614501D0/en
Publication of GB0614501D0 publication Critical patent/GB0614501D0/en
Priority to CN2007800274847A priority patent/CN101490789B/en
Priority to PCT/GB2007/002614 priority patent/WO2008009898A1/en
Priority to EP07766199A priority patent/EP2044608B1/en
Priority to AT07766199T priority patent/ATE556423T1/en
Priority to JP2009520038A priority patent/JP5675099B2/en
Priority to US12/309,460 priority patent/US8354652B2/en
Ceased legal-status Critical Current

Links

GB0614501A 2006-07-20 2006-07-21 Ion sources Ceased GB0614501D0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB0614501A GB0614501D0 (en) 2006-07-21 2006-07-21 Ion sources
CN2007800274847A CN101490789B (en) 2006-07-20 2007-07-12 Ion sources
PCT/GB2007/002614 WO2008009898A1 (en) 2006-07-20 2007-07-12 Ion sources
EP07766199A EP2044608B1 (en) 2006-07-20 2007-07-12 Ion sources
AT07766199T ATE556423T1 (en) 2006-07-20 2007-07-12 ION SOURCES
JP2009520038A JP5675099B2 (en) 2006-07-20 2007-07-12 Ion source
US12/309,460 US8354652B2 (en) 2006-07-20 2007-07-12 Ion source including separate support systems for accelerator grids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0614501A GB0614501D0 (en) 2006-07-21 2006-07-21 Ion sources

Publications (1)

Publication Number Publication Date
GB0614501D0 true GB0614501D0 (en) 2006-08-30

Family

ID=36998485

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0614501A Ceased GB0614501D0 (en) 2006-07-20 2006-07-21 Ion sources

Country Status (2)

Country Link
AT (1) ATE556423T1 (en)
GB (1) GB0614501D0 (en)

Also Published As

Publication number Publication date
ATE556423T1 (en) 2012-05-15

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)