GB0614500D0 - Plasma sources - Google Patents
Plasma sourcesInfo
- Publication number
- GB0614500D0 GB0614500D0 GB0614500A GB0614500A GB0614500D0 GB 0614500 D0 GB0614500 D0 GB 0614500D0 GB 0614500 A GB0614500 A GB 0614500A GB 0614500 A GB0614500 A GB 0614500A GB 0614500 D0 GB0614500 D0 GB 0614500D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- plasma sources
- plasma
- sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0614500A GB0614500D0 (en) | 2006-07-21 | 2006-07-21 | Plasma sources |
EP07733491A EP2044610B1 (en) | 2006-07-20 | 2007-07-06 | Plasma sources |
JP2009520035A JP2009545101A (en) | 2006-07-20 | 2007-07-06 | Plasma source |
US12/309,461 US8400063B2 (en) | 2006-07-20 | 2007-07-06 | Plasma sources |
PCT/GB2007/002550 WO2008009892A1 (en) | 2006-07-20 | 2007-07-06 | Plasma sources |
JP2013242892A JP5878512B2 (en) | 2006-07-20 | 2013-11-25 | Plasma source and ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0614500A GB0614500D0 (en) | 2006-07-21 | 2006-07-21 | Plasma sources |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0614500D0 true GB0614500D0 (en) | 2006-08-30 |
Family
ID=36998484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0614500A Ceased GB0614500D0 (en) | 2006-07-20 | 2006-07-21 | Plasma sources |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB0614500D0 (en) |
-
2006
- 2006-07-21 GB GB0614500A patent/GB0614500D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |