GB0614500D0 - Plasma sources - Google Patents

Plasma sources

Info

Publication number
GB0614500D0
GB0614500D0 GB0614500A GB0614500A GB0614500D0 GB 0614500 D0 GB0614500 D0 GB 0614500D0 GB 0614500 A GB0614500 A GB 0614500A GB 0614500 A GB0614500 A GB 0614500A GB 0614500 D0 GB0614500 D0 GB 0614500D0
Authority
GB
United Kingdom
Prior art keywords
plasma sources
plasma
sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0614500A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0614500A priority Critical patent/GB0614500D0/en
Publication of GB0614500D0 publication Critical patent/GB0614500D0/en
Priority to EP07733491A priority patent/EP2044610B1/en
Priority to JP2009520035A priority patent/JP2009545101A/en
Priority to US12/309,461 priority patent/US8400063B2/en
Priority to PCT/GB2007/002550 priority patent/WO2008009892A1/en
Priority to JP2013242892A priority patent/JP5878512B2/en
Ceased legal-status Critical Current

Links

GB0614500A 2006-07-20 2006-07-21 Plasma sources Ceased GB0614500D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB0614500A GB0614500D0 (en) 2006-07-21 2006-07-21 Plasma sources
EP07733491A EP2044610B1 (en) 2006-07-20 2007-07-06 Plasma sources
JP2009520035A JP2009545101A (en) 2006-07-20 2007-07-06 Plasma source
US12/309,461 US8400063B2 (en) 2006-07-20 2007-07-06 Plasma sources
PCT/GB2007/002550 WO2008009892A1 (en) 2006-07-20 2007-07-06 Plasma sources
JP2013242892A JP5878512B2 (en) 2006-07-20 2013-11-25 Plasma source and ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0614500A GB0614500D0 (en) 2006-07-21 2006-07-21 Plasma sources

Publications (1)

Publication Number Publication Date
GB0614500D0 true GB0614500D0 (en) 2006-08-30

Family

ID=36998484

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0614500A Ceased GB0614500D0 (en) 2006-07-20 2006-07-21 Plasma sources

Country Status (1)

Country Link
GB (1) GB0614500D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)