GB0613788D0 - Gas supply apparatus - Google Patents
Gas supply apparatusInfo
- Publication number
- GB0613788D0 GB0613788D0 GBGB0613788.9A GB0613788A GB0613788D0 GB 0613788 D0 GB0613788 D0 GB 0613788D0 GB 0613788 A GB0613788 A GB 0613788A GB 0613788 D0 GB0613788 D0 GB 0613788D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- gas supply
- supply apparatus
- gas
- supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Magnetically Actuated Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0613788A GB2439948B (en) | 2006-07-12 | 2006-07-12 | Gas supply apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0613788A GB2439948B (en) | 2006-07-12 | 2006-07-12 | Gas supply apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0613788D0 true GB0613788D0 (en) | 2006-08-23 |
GB2439948A GB2439948A (en) | 2008-01-16 |
GB2439948B GB2439948B (en) | 2010-11-24 |
Family
ID=36955467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0613788A Expired - Fee Related GB2439948B (en) | 2006-07-12 | 2006-07-12 | Gas supply apparatus |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2439948B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9600001B2 (en) | 2012-01-13 | 2017-03-21 | Perkinelmer Health Sciences, Inc. | Devices, systems and methods for purging and loading sorbent tubes |
GB2500610A (en) * | 2012-03-26 | 2013-10-02 | Edwards Ltd | Apparatus to supply purge gas to a multistage vacuum pump |
GB2513300B (en) * | 2013-04-04 | 2017-10-11 | Edwards Ltd | Vacuum pumping and abatement system |
GB2535703B (en) * | 2015-02-23 | 2019-09-18 | Edwards Ltd | Gas supply apparatus |
FR3086705B1 (en) * | 2018-09-27 | 2020-10-23 | Pfeiffer Vacuum | DRY TYPE PRIMARY VACUUM PUMP AND PROCESS FOR CONTROL OF THE INJECTION OF A PURGE GAS |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04161241A (en) * | 1990-10-26 | 1992-06-04 | Nec Kyushu Ltd | Gas supply device |
US5908504A (en) * | 1995-09-20 | 1999-06-01 | Memc Electronic Materials, Inc. | Method for tuning barrel reactor purge system |
-
2006
- 2006-07-12 GB GB0613788A patent/GB2439948B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2439948A (en) | 2008-01-16 |
GB2439948B (en) | 2010-11-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
COOA | Change in applicant's name or ownership of the application |
Owner name: EDWARDS LIMITED Free format text: FORMER APPLICANT(S): BOC GROUP, THE PLC |
|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20110712 |