GB0516098D0 - Electron-optical apparatus - Google Patents

Electron-optical apparatus

Info

Publication number
GB0516098D0
GB0516098D0 GB0516098A GB0516098A GB0516098D0 GB 0516098 D0 GB0516098 D0 GB 0516098D0 GB 0516098 A GB0516098 A GB 0516098A GB 0516098 A GB0516098 A GB 0516098A GB 0516098 D0 GB0516098 D0 GB 0516098D0
Authority
GB
United Kingdom
Prior art keywords
electron
optical apparatus
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0516098A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CAMBRIDGE IMAGE TECHNOLOGY Ltd
Original Assignee
CAMBRIDGE IMAGE TECHNOLOGY Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CAMBRIDGE IMAGE TECHNOLOGY Ltd filed Critical CAMBRIDGE IMAGE TECHNOLOGY Ltd
Priority to GB0516098A priority Critical patent/GB0516098D0/en
Publication of GB0516098D0 publication Critical patent/GB0516098D0/en
Priority to PCT/GB2006/002306 priority patent/WO2007017621A1/en
Ceased legal-status Critical Current

Links

GB0516098A 2005-08-05 2005-08-05 Electron-optical apparatus Ceased GB0516098D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0516098A GB0516098D0 (en) 2005-08-05 2005-08-05 Electron-optical apparatus
PCT/GB2006/002306 WO2007017621A1 (en) 2005-08-05 2006-06-22 Electron-optical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0516098A GB0516098D0 (en) 2005-08-05 2005-08-05 Electron-optical apparatus

Publications (1)

Publication Number Publication Date
GB0516098D0 true GB0516098D0 (en) 2005-09-14

Family

ID=34984123

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0516098A Ceased GB0516098D0 (en) 2005-08-05 2005-08-05 Electron-optical apparatus

Country Status (2)

Country Link
GB (1) GB0516098D0 (en)
WO (1) WO2007017621A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10429314B2 (en) * 2017-07-31 2019-10-01 Taiwan Semiconductor Manufacturing Co., Ltd. EUV vessel inspection method and related system
CN115616017B (en) * 2022-09-30 2023-11-10 南方科技大学 Electronic optical test platform device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1260575B (en) * 1962-09-04 1968-02-08 United Aircraft Corp Procedure for the non-destructive testing of electronic components
JPS60247140A (en) * 1984-05-22 1985-12-06 Shimadzu Corp Cathode luminescence apparatus

Also Published As

Publication number Publication date
WO2007017621A1 (en) 2007-02-15

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)