JPS60247140A - Cathode luminescence apparatus - Google Patents
Cathode luminescence apparatusInfo
- Publication number
- JPS60247140A JPS60247140A JP10409084A JP10409084A JPS60247140A JP S60247140 A JPS60247140 A JP S60247140A JP 10409084 A JP10409084 A JP 10409084A JP 10409084 A JP10409084 A JP 10409084A JP S60247140 A JPS60247140 A JP S60247140A
- Authority
- JP
- Japan
- Prior art keywords
- light
- detector
- mirror
- spectrometer
- switching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2254—Measuring cathodoluminescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【発明の詳細な説明】 （イ）、産業上の利用分野 本発明はカソードルミネッセンス装置に関する。[Detailed description of the invention] (b) Industrial application fields The present invention relates to cathodoluminescent devices.
（ロ）、従来技術
一般に、波長分散形のカソードルミネッセンス装置には
回折格子を有する分光器を設けたものがある。この種の
カソードルミネッセンス装置で、分光器の測定波長範囲
を広げるには従来、格子間換の大きな回折格子が適用さ
れる。ところが、回折格子の格子間換が大きいと、逆に
波長分解能が低下肱適性な情報が得られなくなる。つま
り、測定波長範囲の拡大と波長分解能とは相反する特性
があるので、従来の装置では一方の要求を満すと他方の
特性を犠牲にせねばならないという不具合がある。(b) Prior Art Generally, some wavelength dispersive cathodoluminescence devices are equipped with a spectrometer having a diffraction grating. Conventionally, in this type of cathodoluminescence device, a diffraction grating with a large grating spacing is used to widen the measurement wavelength range of the spectrometer. However, if the grating spacing of the diffraction grating is large, the wavelength resolution decreases and it becomes impossible to obtain appropriate information. In other words, since expansion of the measurement wavelength range and wavelength resolution have contradictory characteristics, conventional devices have a problem in that satisfying one requirement requires sacrificing the other characteristic.
（ハ）、目的
本発明は従来のかかる問題点を解決し、波長分解能を損
うことなく、測定波長範囲が広い波長分散形のカソード
ルミネッセンス装置を提供することを目的とする。(C).Objective The present invention aims to solve the above-mentioned conventional problems and provide a wavelength-dispersive cathodoluminescence device that can measure a wide wavelength range without impairing wavelength resolution.
（ニ）、構成
本発明は上記の目的を達成するため、試料から放射され
るカソードルミネッセンスの光を反射するミラーの複数
個が互いに異なる角度に配置されるとともに、これらの
各ミラーを切換える切換手段を備え、前記各ミラーの反
射位置にはそれぞれ分光器が設けられ、これらの各分光
器には分光器の切換波長を設定するリミットスイッチが
取付けられ、これらの各リミットスイッチが前記切換手
段の駆動部、前記分光器で分光された光を検出する検出
器および検出器から出力される検出信号を処理する信号
処理部にそれぞれ共通に接続されてカソードルミネッセ
ンス装置を構成したものである。(d), Structure In order to achieve the above object, the present invention includes a plurality of mirrors that reflect cathodoluminescence light emitted from a sample, which are arranged at different angles, and a switching means for switching each of these mirrors. A spectrometer is provided at the reflection position of each of the mirrors, and a limit switch for setting the switching wavelength of the spectrometer is attached to each of these spectrometers, and each of these limit switches drives the switching means. A cathodoluminescence device is constructed by being connected in common to a detector for detecting light separated by the spectrometer, and a signal processing unit for processing a detection signal output from the detector.
（ホ）、実施例
以下、本発明を実施例について図面に基づいて詳細に説
明する。(e) Examples The present invention will now be described in detail with reference to the drawings.
第１図はこの実施例のカソードルミネッセンス装置の構
成図である。同図において符号１はカソードルミネッセ
ンス装置を示し、２は試料、４は電子銃（図示省略）か
ら放出される電子ビームを収束するための対物レンズ、
６・８は反射対物レンズ、１０は反射ミラーであり、こ
れらは真空室１２を形成するハウジング１４内に配置さ
れている。１６は真空封止用の光透過窓である。FIG. 1 is a block diagram of the cathode luminescence device of this embodiment. In the figure, reference numeral 1 indicates a cathode luminescence device, 2 a sample, 4 an objective lens for converging an electron beam emitted from an electron gun (not shown),
6 and 8 are reflective objective lenses, and 10 is a reflective mirror, which are arranged in a housing 14 forming a vacuum chamber 12. 16 is a light transmitting window for vacuum sealing.
さらに、このカソードルミネッセンス装置１は試料２か
ら放射されるカソードルミネッセンスの光を反射する第
１と第２の各ミラー１８ａ・１８ｂが基台２０上に互い
に直交配置されるとともにこれらの第１、第２ミラー１
８ａ・１８ｂを切換え、る切換手段２２を備える。この
切換手段２２は、たとえば上記基台２０に取付けられた
ラック２４、ラック２４に噛合するピニオン２６および
ピニオン２６を駆動するモータ２８とで構成される。６
０ａ１１５０ｂは第１、第２の各ミラー１８ａ−１８ｂ
の反射位置に設けられた第１、第２の各分光器であり、
各分光器５０ａ−５０１）は対象波長範囲に適合するよ
うに、たとえば第２図に示すごとく第１分光器５０ａは
短波長用としてλ、〜λ２の測定波長範囲に、第２分光
器５０１）は長波長用としてλ′、〜λ′２の測定波長
範囲にそれぞれ設定さ第２の各リミットスイッチ５２ａ
・５２ｂがそれぞれ取付けられており、これらの各リミ
ットスイッチ５２ａ・５２ｂが切換手段２２の駆動部で
あるモータ２８に制御回路！＋４を介して各々接続され
ている。さらに、第１リミツトスイツチ３２ａは第１分
光器５０ａで分光された光を検出する第１検出器５６ａ
および第１検出器５６ａから出力される検出信号を増幅
処理する第１増幅器５８ａにそれぞれ共通に接続され、
一方、第２リミツトスイツチ５２ｂは第２分光器６０ｂ
で分光された光を検出する第２検出器′５６ｂおよび第
２検出器′５６ｂから出力される検出信号を増幅処理す
る第２増幅器５８ｂにそれぞれ共通に接続されている。Further, in this cathodoluminescence device 1, first and second mirrors 18a and 18b that reflect cathodoluminescence light emitted from the sample 2 are arranged orthogonally to each other on a base 20, and 2 mirror 1
A switching means 22 is provided for switching between 8a and 18b. This switching means 22 includes, for example, a rack 24 attached to the base 20, a pinion 26 that meshes with the rack 24, and a motor 28 that drives the pinion 26. 6
0a1150b is each of the first and second mirrors 18a-18b
first and second spectrometers provided at reflection positions,
Each spectrometer 50a-501) is adapted to the target wavelength range, for example, as shown in FIG. are set in the measurement wavelength range of λ', ~λ'2 for long wavelengths, respectively, and the second limit switches 52a
- 52b are respectively attached, and each of these limit switches 52a and 52b is a control circuit for the motor 28 which is the drive part of the switching means 22! +4 are connected to each other. Furthermore, the first limit switch 32a is connected to a first detector 56a that detects the light separated by the first spectrometer 50a.
and a first amplifier 58a that amplifies the detection signal output from the first detector 56a, respectively,
On the other hand, the second limit switch 52b is connected to the second spectrometer 60b.
They are respectively commonly connected to a second detector '56b that detects the light spectrally separated by a second detector '56b and a second amplifier 58b that amplifies a detection signal outputted from the second detector '56b.
なお４０はＣＲＴモニタやレコーダ等を含む信号記録表
示部である。Note that 40 is a signal recording/display section including a CRT monitor, recorder, etc.
このような構成において、カソードルミネッセンスの測
定を行なう場合には、電子ビーム照射により試料２から
放出されるカソードルミネッセンスの光を反射対物レン
ズ６・８、反射ミラー１０によって光透過窓１６から真
空外に取出す。真空外に取出された光が第１ミラー１８
ａで反射されると、この反射光は第１分光器５０ａに入
射される。その際、第１検出器′５６ａは制御回路′５
４からの制御信号によって、たとえば低波長λ１側から
高波長λ２側に走査される。この走査にともない、第１
分光器５０ａで分光された光は逐次第１検出器５６ａで
検出される。第１検出器５６ａからは分光検出された光
に対応する検出信号が出力されるので、この検出信号を
第１増幅器５８ａで増幅した後、信号記録表示部４０へ
送出する。第１分光器５０ａが第２図に示すように切換
波長λ２まで走査されると、第１リミツトスイツチ５２
ａが動作し、第１リミツトスイツチ′５２ａから切換信
号が出力される。この切換信号は制御回路５４、第１検
出器′５６ａおよび第１増幅器５８ａに共通に与えられ
る。制御回路５４は第１１Ｊ ミツトスイッチ５２ａか
らの切換信号に応答してモータ２８に駆動信号を出力す
るのでモータ２８の駆動により基台２０が移動し、第１
ミラー１８ａに代って第２ミラー１８１）が光学系に挿
入される。このため、第２ミラー１８ｂによる反射光が
第２分光器６０ｂに入射される。また、第１検出器５６
ａと第１増幅器′５８ａとは第１リミツトスイツチ５２
ａからの切換信号によりＯＦＦとなる。さらに、制御回
路６４からは第１リミツトスイツチ５２ａからの切換信
号に応答して駆動信号が第２分光器′５ｏｂ、第２検出
器６６ｂおよび第２増幅器′５８ｂにそれぞれ出力され
る。これにより、第１分光器５０ａが第２ミラー１８ｂ
の切換と同時に、低波長λ１′側から高波長λ２′側に
向って走査されるとともに、第２検出器５６ｂと第２増
幅器６８ｂが共にＯＮとなる。従って、第２分光器５０
ｂの走査により分光された光が逐次第２検出器６６ｂで
検出され、その検出信号が第２増幅器５８ｂで増幅され
た後、記号記録表示部４０に送出される。In such a configuration, when measuring cathodoluminescence, the cathodoluminescence light emitted from the sample 2 by electron beam irradiation is emitted from the light transmission window 16 to the outside of vacuum by the reflecting objective lenses 6 and 8 and the reflecting mirror 10. Take it out. The light taken out of the vacuum passes through the first mirror 18
When reflected by a, this reflected light is incident on the first spectrometer 50a. At this time, the first detector '56a is connected to the control circuit '56a.
4, scanning is performed, for example, from the low wavelength λ1 side to the high wavelength λ2 side. Along with this scanning, the first
The light separated by the spectroscope 50a is sequentially detected by a first detector 56a. Since the first detector 56a outputs a detection signal corresponding to the spectrally detected light, this detection signal is amplified by the first amplifier 58a and then sent to the signal recording/display section 40. When the first spectrometer 50a is scanned to the switching wavelength λ2 as shown in FIG.
a is operated, and a switching signal is output from the first limit switch '52a. This switching signal is commonly applied to the control circuit 54, the first detector '56a, and the first amplifier 58a. The control circuit 54 outputs a drive signal to the motor 28 in response to the switching signal from the 11th J Mitswitch 52a, so the base 20 moves due to the drive of the motor 28, and the
A second mirror 181) is inserted into the optical system in place of the mirror 18a. Therefore, the light reflected by the second mirror 18b is incident on the second spectrometer 60b. In addition, the first detector 56
a and the first amplifier '58a are the first limit switch 52
It is turned off by the switching signal from a. Further, the control circuit 64 outputs drive signals to the second spectrometer '5ob, the second detector 66b and the second amplifier '58b, respectively, in response to the switching signal from the first limit switch 52a. As a result, the first spectrometer 50a becomes the second mirror 18b.
Simultaneously with the switching, scanning is performed from the low wavelength λ1' side to the high wavelength λ2' side, and both the second detector 56b and the second amplifier 68b are turned on. Therefore, the second spectrometer 50
The light separated by scanning b is sequentially detected by the second detector 66b, and the detection signal is amplified by the second amplifier 58b and then sent to the symbol recording/displaying section 40.
上記と逆に、高波長側から低波長側へ向って第１、第２
の各分光器５０ａ−５０ｂを走査する場合には、第２分
光器５ｏｂが切換波長λ１′まで走査されたときに第２
リミツトスイツチ５２ｂが動作し、第２リミツトスイツ
チ５２ｂから切換信号が出力される。これにより、第２
ミラー１８ｂが第１ミラー１８ａに切換わるとともに、
第１分光器５０ａ、第１検出器５６ａおよび第１増幅器
６８ａが共にＯＮとなり、測定動作を開始することにな
る。Contrary to the above, from the high wavelength side to the low wavelength side, the first and second
When scanning each of the spectrometers 50a-50b, when the second spectrometer 5ob is scanned to the switching wavelength λ1', the second spectrometer 5ob is scanned to the switching wavelength λ1'.
The limit switch 52b operates and a switching signal is output from the second limit switch 52b. This allows the second
As the mirror 18b switches to the first mirror 18a,
The first spectrometer 50a, the first detector 56a, and the first amplifier 68a are all turned on, and a measurement operation is started.
（へ）、効果
以上のように本発明によれば、対象とする測定波長範囲
の異なる分光器が連絡的に切換えて走査されるので、広
い波長範囲にわたり、しかも分解能を損うことなくカソ
ードルミネッセンスの測定ができるようになるという優
れた効果が得られる。(f) Effects As described above, according to the present invention, spectrometers with different target measurement wavelength ranges are sequentially switched and scanned, so that cathodoluminescence can be measured over a wide wavelength range without compromising resolution. This has the excellent effect of making it possible to measure
図面は本発明の一実施例を示すもので、第１図はカソー
ドルミネッセンス装置の構成図、第２図は分光器の走査
動作の説明図である。
１・・・カソードルミネッセンス装置、１８ａ・１８ｂ
・・・第１、第２ミラー、２２・・・切換手段、３０ａ
−５Ｑｂ・・・第１、第２分光器、３２ａ−５２ｂ・・
・第１、第２リミットスイッチＳ５６ａｍ５６ｂ・・・
第１、第２検出器、５８ａ−５８ｔ）・・・第１、第２
増幅器。The drawings show one embodiment of the present invention, and FIG. 1 is a block diagram of a cathode luminescence device, and FIG. 2 is an explanatory diagram of a scanning operation of a spectrometer. 1... Cathode luminescence device, 18a/18b
...first and second mirrors, 22...switching means, 30a
-5Qb...first and second spectrometers, 32a-52b...
・First and second limit switches S56am56b...
1st, 2nd detector, 58a-58t)... 1st, 2nd
amplifier.
Claims (1)
光を反射するミラーの複数個が互いに異なる角度に配置
されるとともに、これらの各ミラーを切換える切換手段
を備え、前記各ミラーの反射位置にはそれぞれ分光器が
設けられ、これらの各分光器には分光器の切換波長を設
定するリミットスイッチが取付けられ、どれらの各リミ
ットスイッチが前記切換手段の駆動部、前記分光器で分
光された光を検出する検出器および検出器から出力され
る検出信号を処理する信号処理部にそれぞれ共通に接続
されていることを特徴とするカソードルミネッセンス装
置。(1) A plurality of mirrors that reflect the cathodoluminescence light emitted from the sample are arranged at different angles, and a switching means is provided for switching each of these mirrors, and each of the mirrors has a respective one at a reflecting position. A spectrometer is provided, and each of these spectrometers is equipped with a limit switch for setting a switching wavelength of the spectrometer, and each limit switch is a driving part of the switching means, and a limit switch is attached to each of these spectrometers to set a switching wavelength of the spectrometer. A cathodoluminescence device characterized in that it is commonly connected to a detector for detecting and a signal processing unit for processing a detection signal output from the detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10409084A JPS60247140A (en) | 1984-05-22 | 1984-05-22 | Cathode luminescence apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10409084A JPS60247140A (en) | 1984-05-22 | 1984-05-22 | Cathode luminescence apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60247140A true JPS60247140A (en) | 1985-12-06 |
Family
ID=14371424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10409084A Pending JPS60247140A (en) | 1984-05-22 | 1984-05-22 | Cathode luminescence apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60247140A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007017621A1 (en) * | 2005-08-05 | 2007-02-15 | Cambridge Image Technology Limited | Electron-optical apparatus |
| US8674320B2 (en) | 2010-10-01 | 2014-03-18 | Attolight Sa | Deconvolution of time-gated cathodoluminescence images |
-
1984
- 1984-05-22 JP JP10409084A patent/JPS60247140A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007017621A1 (en) * | 2005-08-05 | 2007-02-15 | Cambridge Image Technology Limited | Electron-optical apparatus |
| US8674320B2 (en) | 2010-10-01 | 2014-03-18 | Attolight Sa | Deconvolution of time-gated cathodoluminescence images |
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