GB0329933D0 - Load lock - Google Patents

Load lock

Info

Publication number
GB0329933D0
GB0329933D0 GB0329933A GB0329933A GB0329933D0 GB 0329933 D0 GB0329933 D0 GB 0329933D0 GB 0329933 A GB0329933 A GB 0329933A GB 0329933 A GB0329933 A GB 0329933A GB 0329933 D0 GB0329933 D0 GB 0329933D0
Authority
GB
United Kingdom
Prior art keywords
load lock
lock
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0329933A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0329933A priority Critical patent/GB0329933D0/en
Publication of GB0329933D0 publication Critical patent/GB0329933D0/en
Priority to PCT/GB2004/005346 priority patent/WO2005061758A1/en
Priority to TW93140562A priority patent/TW200528374A/en
Ceased legal-status Critical Current

Links

GB0329933A 2003-12-24 2003-12-24 Load lock Ceased GB0329933D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0329933A GB0329933D0 (en) 2003-12-24 2003-12-24 Load lock
PCT/GB2004/005346 WO2005061758A1 (en) 2003-12-24 2004-12-21 Transfer system
TW93140562A TW200528374A (en) 2003-12-24 2004-12-24 Transfer system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0329933A GB0329933D0 (en) 2003-12-24 2003-12-24 Load lock

Publications (1)

Publication Number Publication Date
GB0329933D0 true GB0329933D0 (en) 2004-01-28

Family

ID=30776451

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0329933A Ceased GB0329933D0 (en) 2003-12-24 2003-12-24 Load lock

Country Status (3)

Country Link
GB (1) GB0329933D0 (en)
TW (1) TW200528374A (en)
WO (1) WO2005061758A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018102693B4 (en) 2018-02-07 2024-06-27 VON ARDENNE Asset GmbH & Co. KG Dehydration network, vacuum arrangement and process
JP7430677B2 (en) * 2021-09-21 2024-02-13 株式会社Kokusai Electric Substrate processing equipment, semiconductor device manufacturing method and program
CN117305801B (en) * 2023-11-29 2024-03-08 龙焱能源科技（杭州）有限公司 Transmission device for substrate coating and coating transmission system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194001A (en) * 1981-05-21 1982-11-29 Sankyo Sekkei Jimusho:Kk Circulating method for waste gas of indirect type dryer
JPS60253723A (en) * 1985-03-20 1985-12-14 Matsushita Electric Ind Co Ltd Supplying device of oxygen enriched gas for combustion
JP3323530B2 (en) * 1991-04-04 2002-09-09 株式会社日立製作所 Method for manufacturing semiconductor device
JP3330166B2 (en) * 1992-12-04 2002-09-30 東京エレクトロン株式会社 Processing equipment
JP3644036B2 (en) * 1995-02-15 2005-04-27 株式会社日立製作所 Semiconductor device manufacturing method and semiconductor manufacturing apparatus
JP2942239B2 (en) * 1997-05-23 1999-08-30 キヤノン株式会社 Exhaust method and exhaust apparatus, plasma processing method and plasma processing apparatus using the same
JP4330703B2 (en) * 1999-06-18 2009-09-16 東京エレクトロン株式会社 Transport module and cluster system
EP1126508A3 (en) * 2000-02-16 2005-03-30 Applied Materials, Inc. Processing apparatus having integrated pumping system
FR2807951B1 (en) * 2000-04-20 2003-05-16 Cit Alcatel METHOD AND SYSTEM FOR PUMPING SEMICONDUCTOR EQUIPMENT TRANSFER CHAMBERS
US6750155B2 (en) * 2001-08-08 2004-06-15 Lam Research Corporation Methods to minimize moisture condensation over a substrate in a rapid cycle chamber
US6701972B2 (en) * 2002-01-11 2004-03-09 The Boc Group, Inc. Vacuum load lock, system including vacuum load lock, and associated methods

Also Published As

Publication number Publication date
WO2005061758A1 (en) 2005-07-07
TW200528374A (en) 2005-09-01

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)