GB0312796D0 - Trench filling methods - Google Patents

Trench filling methods

Info

Publication number
GB0312796D0
GB0312796D0 GB0312796A GB0312796A GB0312796D0 GB 0312796 D0 GB0312796 D0 GB 0312796D0 GB 0312796 A GB0312796 A GB 0312796A GB 0312796 A GB0312796 A GB 0312796A GB 0312796 D0 GB0312796 D0 GB 0312796D0
Authority
GB
United Kingdom
Prior art keywords
trench filling
filling methods
methods
trench
filling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0312796A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Priority to GB0312796A priority Critical patent/GB0312796D0/en
Publication of GB0312796D0 publication Critical patent/GB0312796D0/en
Priority to GB0411952A priority patent/GB2402549A/en
Priority to DE200410026656 priority patent/DE102004026656A1/en
Priority to US10/859,550 priority patent/US20040248375A1/en
Priority to JP2004167357A priority patent/JP2004363615A/en
Ceased legal-status Critical Current

Links

GB0312796A 2003-06-04 2003-06-04 Trench filling methods Ceased GB0312796D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB0312796A GB0312796D0 (en) 2003-06-04 2003-06-04 Trench filling methods
GB0411952A GB2402549A (en) 2003-06-04 2004-05-28 Two layer filling for high aspect ratio trenches
DE200410026656 DE102004026656A1 (en) 2003-06-04 2004-06-01 Trench filling method
US10/859,550 US20040248375A1 (en) 2003-06-04 2004-06-03 Trench filling methods
JP2004167357A JP2004363615A (en) 2003-06-04 2004-06-04 Method for burying trench

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0312796A GB0312796D0 (en) 2003-06-04 2003-06-04 Trench filling methods

Publications (1)

Publication Number Publication Date
GB0312796D0 true GB0312796D0 (en) 2003-07-09

Family

ID=9959291

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0312796A Ceased GB0312796D0 (en) 2003-06-04 2003-06-04 Trench filling methods
GB0411952A Withdrawn GB2402549A (en) 2003-06-04 2004-05-28 Two layer filling for high aspect ratio trenches

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB0411952A Withdrawn GB2402549A (en) 2003-06-04 2004-05-28 Two layer filling for high aspect ratio trenches

Country Status (3)

Country Link
JP (1) JP2004363615A (en)
DE (1) DE102004026656A1 (en)
GB (2) GB0312796D0 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007335807A (en) * 2006-06-19 2007-12-27 Toshiba Corp Method for manufacturing semiconductor device
JP5841306B2 (en) * 2009-05-08 2016-01-13 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576834A (en) * 1985-05-20 1986-03-18 Ncr Corporation Method for forming trench isolation structures
US5244827A (en) * 1991-10-31 1993-09-14 Sgs-Thomson Microelectronics, Inc. Method for planarized isolation for cmos devices
KR100512167B1 (en) * 2001-03-12 2005-09-02 삼성전자주식회사 Method of forming trench type isolation layer
US20020182824A1 (en) * 2001-06-05 2002-12-05 United Microelectronics Corp. Method of forming shallow trench isolation
US6737333B2 (en) * 2001-07-03 2004-05-18 Texas Instruments Incorporated Semiconductor device isolation structure and method of forming
KR100428805B1 (en) * 2001-08-09 2004-04-28 삼성전자주식회사 Structure of Trench Isolation and Method of Forming The Same

Also Published As

Publication number Publication date
GB0411952D0 (en) 2004-06-30
JP2004363615A (en) 2004-12-24
DE102004026656A1 (en) 2004-12-30
GB2402549A (en) 2004-12-08

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)