GB0302450D0 - Electron beam plotter - Google Patents

Electron beam plotter

Info

Publication number
GB0302450D0
GB0302450D0 GB0302450A GB0302450A GB0302450D0 GB 0302450 D0 GB0302450 D0 GB 0302450D0 GB 0302450 A GB0302450 A GB 0302450A GB 0302450 A GB0302450 A GB 0302450A GB 0302450 D0 GB0302450 D0 GB 0302450D0
Authority
GB
United Kingdom
Prior art keywords
electron beam
beam plotter
plotter
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0302450A
Other versions
GB2390477B (en
GB2390477A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Publication of GB0302450D0 publication Critical patent/GB0302450D0/en
Publication of GB2390477A publication Critical patent/GB2390477A/en
Application granted granted Critical
Publication of GB2390477B publication Critical patent/GB2390477B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/03—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by deforming with non-mechanical means, e.g. laser, beam of particles
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Optical Recording Or Reproduction (AREA)
GB0302450A 2002-02-21 2003-02-03 Electron beam plotter Expired - Fee Related GB2390477B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002044104A JP2003242924A (en) 2002-02-21 2002-02-21 Electron beam lithography device

Publications (3)

Publication Number Publication Date
GB0302450D0 true GB0302450D0 (en) 2003-03-05
GB2390477A GB2390477A (en) 2004-01-07
GB2390477B GB2390477B (en) 2005-08-03

Family

ID=19192762

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0302450A Expired - Fee Related GB2390477B (en) 2002-02-21 2003-02-03 Electron beam plotter

Country Status (2)

Country Link
JP (1) JP2003242924A (en)
GB (1) GB2390477B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200809856A (en) 2006-03-28 2008-02-16 Pioneer Corp Recording system, recording device, and recording control signal generation device
JP4789260B2 (en) * 2006-08-23 2011-10-12 エスアイアイ・ナノテクノロジー株式会社 Charged particle beam apparatus and aperture axis adjusting method
JP2014011374A (en) 2012-07-02 2014-01-20 Nuflare Technology Inc Mask drawing method and mask drawing device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136141A (en) * 1984-07-26 1986-02-20 Nippon Sheet Glass Co Ltd Method for bonding glass tube to metal fixture
JPS6228090A (en) * 1985-07-29 1987-02-06 Hitachi Ltd Beam aligner for electron beam
JPS6263425A (en) * 1986-08-26 1987-03-20 Toshiba Corp Electron beam exposure system
JPH10289860A (en) * 1997-04-16 1998-10-27 Nikon Corp Method for adjusting beam of projection optical system and projection optical system

Also Published As

Publication number Publication date
JP2003242924A (en) 2003-08-29
GB2390477B (en) 2005-08-03
GB2390477A (en) 2004-01-07

Similar Documents

Publication Publication Date Title
HK1094016A1 (en) An improved beam
GB2386247B (en) Ion beam generator
GB0509430D0 (en) Antenna with adjustable beam direction
AU2003296941A8 (en) Electron beam sensor
GB0123136D0 (en) Structural Beam
EP1638137A4 (en) Electron beam microprocessing method
EP1554444A4 (en) A beam
GB2390477B (en) Electron beam plotter
GB2389225B (en) Device for influencing an electron beam
GB2408056B (en) Structural beam member
GB0101028D0 (en) An anode
AU2003269733A1 (en) Beam
GB0300186D0 (en) Beams
GB0228011D0 (en) Electron beam tubes
CA96467S (en) Beam
GB0330045D0 (en) An envelope
AUPS163002A0 (en) Beam
GB0109058D0 (en) Beam
TW519158U (en) Form supporting beam
GB0304898D0 (en) Measuring Electron beam spot size
GB0211855D0 (en) The laser stamp
PL353970A1 (en) Fender beam
PL114056U1 (en) Transport beam
AU151731S (en) An envelope
AU151730S (en) An envelope

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100203