GB0201590D0 - Depositing a tantalum film - Google Patents

Depositing a tantalum film

Info

Publication number
GB0201590D0
GB0201590D0 GB0201590A GB0201590A GB0201590D0 GB 0201590 D0 GB0201590 D0 GB 0201590D0 GB 0201590 A GB0201590 A GB 0201590A GB 0201590 A GB0201590 A GB 0201590A GB 0201590 D0 GB0201590 D0 GB 0201590D0
Authority
GB
United Kingdom
Prior art keywords
depositing
tantalum film
tantalum
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0201590A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0201590A priority Critical patent/GB0201590D0/en
Publication of GB0201590D0 publication Critical patent/GB0201590D0/en
Priority to JP2003514971A priority patent/JP4181035B2/en
Priority to PCT/GB2002/003238 priority patent/WO2003008660A1/en
Priority to KR1020027017672A priority patent/KR20040015670A/en
Priority to GB0400103A priority patent/GB2393189B/en
Priority to US10/483,805 priority patent/US7129161B2/en
Priority to TW091116048A priority patent/TWI294918B/en
Ceased legal-status Critical Current

Links

GB0201590A 2001-01-24 2002-01-24 Depositing a tantalum film Ceased GB0201590D0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB0201590A GB0201590D0 (en) 2002-01-24 2002-01-24 Depositing a tantalum film
JP2003514971A JP4181035B2 (en) 2001-07-19 2002-07-15 Tantalum film deposition
PCT/GB2002/003238 WO2003008660A1 (en) 2001-07-19 2002-07-15 Depositing a tantalum film
KR1020027017672A KR20040015670A (en) 2001-01-24 2002-07-15 Depositing a Tantalum Film
GB0400103A GB2393189B (en) 2001-07-19 2002-07-15 Depositing a tantalum film
US10/483,805 US7129161B2 (en) 2001-07-19 2002-07-15 Depositing a tantalum film
TW091116048A TWI294918B (en) 2001-07-19 2002-07-18 Depositing a tantalum film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0201590A GB0201590D0 (en) 2002-01-24 2002-01-24 Depositing a tantalum film

Publications (1)

Publication Number Publication Date
GB0201590D0 true GB0201590D0 (en) 2002-03-13

Family

ID=9929653

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0201590A Ceased GB0201590D0 (en) 2001-01-24 2002-01-24 Depositing a tantalum film

Country Status (1)

Country Link
GB (1) GB0201590D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)