AU2002319437A1 - Depositing a tantalum film - Google Patents

Depositing a tantalum film

Info

Publication number
AU2002319437A1
AU2002319437A1 AU2002319437A AU2002319437A AU2002319437A1 AU 2002319437 A1 AU2002319437 A1 AU 2002319437A1 AU 2002319437 A AU2002319437 A AU 2002319437A AU 2002319437 A AU2002319437 A AU 2002319437A AU 2002319437 A1 AU2002319437 A1 AU 2002319437A1
Authority
AU
Australia
Prior art keywords
depositing
tantalum film
tantalum
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002319437A
Inventor
Hilke Donohue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Publication of AU2002319437A1 publication Critical patent/AU2002319437A1/en
Abandoned legal-status Critical Current

Links

AU2002319437A 2001-07-19 2002-07-15 Depositing a tantalum film Abandoned AU2002319437A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0201590.7 2001-01-24
GB0117599.1 2001-07-19
GB0206116.6 2002-03-15

Publications (1)

Publication Number Publication Date
AU2002319437A1 true AU2002319437A1 (en) 2003-03-03

Family

ID=

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