GB0127474D0 - Forming low k dielectric layers - Google Patents

Forming low k dielectric layers

Info

Publication number
GB0127474D0
GB0127474D0 GB0127474A GB0127474A GB0127474D0 GB 0127474 D0 GB0127474 D0 GB 0127474D0 GB 0127474 A GB0127474 A GB 0127474A GB 0127474 A GB0127474 A GB 0127474A GB 0127474 D0 GB0127474 D0 GB 0127474D0
Authority
GB
United Kingdom
Prior art keywords
dielectric layers
forming low
forming
low
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0127474A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0127474A priority Critical patent/GB0127474D0/en
Publication of GB0127474D0 publication Critical patent/GB0127474D0/en
Priority to PCT/GB2002/005173 priority patent/WO2003044843A2/en
Priority to GB0404866A priority patent/GB2395493B/en
Priority to JP2003546388A priority patent/JP2005510082A/en
Priority to AU2002343029A priority patent/AU2002343029A1/en
Priority to US10/298,225 priority patent/US7205246B2/en
Priority to TW91133869A priority patent/TW575939B/en
Ceased legal-status Critical Current

Links

GB0127474A 2001-11-16 2001-11-16 Forming low k dielectric layers Ceased GB0127474D0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB0127474A GB0127474D0 (en) 2001-11-16 2001-11-16 Forming low k dielectric layers
PCT/GB2002/005173 WO2003044843A2 (en) 2001-11-16 2002-11-15 Forming low k dielectric layers
GB0404866A GB2395493B (en) 2001-11-16 2002-11-15 Forming low K dielectric layers
JP2003546388A JP2005510082A (en) 2001-11-16 2002-11-15 Formation of low-K dielectric layer
AU2002343029A AU2002343029A1 (en) 2001-11-16 2002-11-15 Forming low k dielectric layers
US10/298,225 US7205246B2 (en) 2001-11-16 2002-11-18 Forming low k dielectric layers
TW91133869A TW575939B (en) 2001-11-16 2002-11-20 Forming low k dielectric layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0127474A GB0127474D0 (en) 2001-11-16 2001-11-16 Forming low k dielectric layers

Publications (1)

Publication Number Publication Date
GB0127474D0 true GB0127474D0 (en) 2002-01-09

Family

ID=9925860

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0127474A Ceased GB0127474D0 (en) 2001-11-16 2001-11-16 Forming low k dielectric layers

Country Status (1)

Country Link
GB (1) GB0127474D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)