AU2002319433A1 - Low dielectric constant layers - Google Patents

Low dielectric constant layers

Info

Publication number
AU2002319433A1
AU2002319433A1 AU2002319433A AU2002319433A AU2002319433A1 AU 2002319433 A1 AU2002319433 A1 AU 2002319433A1 AU 2002319433 A AU2002319433 A AU 2002319433A AU 2002319433 A AU2002319433 A AU 2002319433A AU 2002319433 A1 AU2002319433 A1 AU 2002319433A1
Authority
AU
Australia
Prior art keywords
dielectric constant
low dielectric
constant layers
layers
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002319433A
Inventor
Kathrine Giles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Publication of AU2002319433A1 publication Critical patent/AU2002319433A1/en
Abandoned legal-status Critical Current

Links

AU2002319433A 2001-07-18 2002-07-15 Low dielectric constant layers Abandoned AU2002319433A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0117460.6 2001-07-18
GB0124356.7 2001-10-11

Publications (1)

Publication Number Publication Date
AU2002319433A1 true AU2002319433A1 (en) 2003-03-03

Family

ID=

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