GB0104341D0 - Electronic chuck - Google Patents

Electronic chuck

Info

Publication number
GB0104341D0
GB0104341D0 GB0104341A GB0104341A GB0104341D0 GB 0104341 D0 GB0104341 D0 GB 0104341D0 GB 0104341 A GB0104341 A GB 0104341A GB 0104341 A GB0104341 A GB 0104341A GB 0104341 D0 GB0104341 D0 GB 0104341D0
Authority
GB
United Kingdom
Prior art keywords
electronic chuck
chuck
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0104341A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0104341A priority Critical patent/GB0104341D0/en
Publication of GB0104341D0 publication Critical patent/GB0104341D0/en
Priority to PCT/GB2002/000223 priority patent/WO2002068714A1/en
Ceased legal-status Critical Current

Links

GB0104341A 2001-02-22 2001-02-22 Electronic chuck Ceased GB0104341D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0104341A GB0104341D0 (en) 2001-02-22 2001-02-22 Electronic chuck
PCT/GB2002/000223 WO2002068714A1 (en) 2001-02-22 2002-01-18 Electrostatic chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0104341A GB0104341D0 (en) 2001-02-22 2001-02-22 Electronic chuck

Publications (1)

Publication Number Publication Date
GB0104341D0 true GB0104341D0 (en) 2001-04-11

Family

ID=9909251

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0104341A Ceased GB0104341D0 (en) 2001-02-22 2001-02-22 Electronic chuck

Country Status (2)

Country Link
GB (1) GB0104341D0 (en)
WO (1) WO2002068714A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2154365A (en) * 1984-02-10 1985-09-04 Philips Electronic Associated Loading semiconductor wafers on an electrostatic chuck
US5997962A (en) * 1995-06-30 1999-12-07 Tokyo Electron Limited Plasma process utilizing an electrostatic chuck
JPH10303286A (en) * 1997-02-25 1998-11-13 Applied Materials Inc Electrostatic chuck and semiconductor manufacturing equipment
US6074488A (en) * 1997-09-16 2000-06-13 Applied Materials, Inc Plasma chamber support having an electrically coupled collar ring
US6104596A (en) * 1998-04-21 2000-08-15 Applied Materials, Inc. Apparatus for retaining a subtrate in a semiconductor wafer processing system and a method of fabricating same
JP4053148B2 (en) * 1998-07-28 2008-02-27 株式会社エフオーアイ Plasma processing equipment

Also Published As

Publication number Publication date
WO2002068714A1 (en) 2002-09-06

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)