FR94593E - Procédé pour preparer des tiges de silicium monocristallines. - Google Patents

Procédé pour preparer des tiges de silicium monocristallines.

Info

Publication number
FR94593E
FR94593E FR155793A FR155793A FR94593E FR 94593 E FR94593 E FR 94593E FR 155793 A FR155793 A FR 155793A FR 155793 A FR155793 A FR 155793A FR 94593 E FR94593 E FR 94593E
Authority
FR
France
Prior art keywords
monocrystalline silicon
silicon rods
preparing monocrystalline
preparing
rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR155793A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR94593E publication Critical patent/FR94593E/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR155793A 1966-06-13 1968-06-20 Procédé pour preparer des tiges de silicium monocristallines. Expired FR94593E (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES0104258 1966-06-13
DES0110434 1967-06-21

Publications (1)

Publication Number Publication Date
FR94593E true FR94593E (fr) 1969-09-12

Family

ID=25998491

Family Applications (1)

Application Number Title Priority Date Filing Date
FR155793A Expired FR94593E (fr) 1966-06-13 1968-06-20 Procédé pour preparer des tiges de silicium monocristallines.

Country Status (7)

Country Link
CH (1) CH517525A (fr)
DE (1) DE1644009B2 (fr)
DK (1) DK135154B (fr)
FR (1) FR94593E (fr)
GB (1) GB1228406A (fr)
NL (1) NL6804204A (fr)
SE (1) SE345969B (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4111742A (en) * 1976-09-02 1978-09-05 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for producing crucible-drawn silicon rods containing volatile doping agents
US4789596A (en) * 1987-11-27 1988-12-06 Ethyl Corporation Dopant coated bead-like silicon particles
EP0428415A1 (fr) * 1989-11-16 1991-05-22 Shin-Etsu Handotai Company Limited ProcÀ©dé et pour régler la résistance spécifique d'un monocristal

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10291892A (ja) * 1997-04-22 1998-11-04 Komatsu Electron Metals Co Ltd 結晶中の不純物濃度検出方法および単結晶の製造方法並びに単結晶引上げ装置
US6004393A (en) * 1997-04-22 1999-12-21 Komatsu Electronic Metals Co., Ltd. Detecting method of impurity concentration in crystal, method for producing single crystal and apparatus for the pull-up of a single crystal
DE10250822B4 (de) * 2002-10-31 2006-09-28 Siltronic Ag Verfahren zur Herstellung eines mit leichtflüchtigem Fremdstoff dotierten Einkristalls aus Silicium
NO335110B1 (no) * 2011-10-06 2014-09-15 Elkem Solar As Fremgangsmåte for fremstilling av silisiummonokrystall og multikrystalline silisiumingoter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4111742A (en) * 1976-09-02 1978-09-05 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for producing crucible-drawn silicon rods containing volatile doping agents
US4789596A (en) * 1987-11-27 1988-12-06 Ethyl Corporation Dopant coated bead-like silicon particles
EP0428415A1 (fr) * 1989-11-16 1991-05-22 Shin-Etsu Handotai Company Limited ProcÀ©dé et pour régler la résistance spécifique d'un monocristal

Also Published As

Publication number Publication date
CH517525A (de) 1972-01-15
SE345969B (fr) 1972-06-19
GB1228406A (fr) 1971-04-15
DE1644009B2 (de) 1975-10-09
DE1644009A1 (de) 1970-09-24
DK135154B (da) 1977-03-14
DK135154C (fr) 1977-08-29
NL6804204A (fr) 1968-12-23

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