FR85406E - Perfectionnements à la formation de films métalliques par dépôt de vapeur - Google Patents
Perfectionnements à la formation de films métalliques par dépôt de vapeurInfo
- Publication number
- FR85406E FR85406E FR955938A FR955938A FR85406E FR 85406 E FR85406 E FR 85406E FR 955938 A FR955938 A FR 955938A FR 955938 A FR955938 A FR 955938A FR 85406 E FR85406 E FR 85406E
- Authority
- FR
- France
- Prior art keywords
- formation
- vapor deposition
- metallic films
- films
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR955938A FR85406E (fr) | 1963-12-03 | 1963-12-03 | Perfectionnements à la formation de films métalliques par dépôt de vapeur |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR955938A FR85406E (fr) | 1963-12-03 | 1963-12-03 | Perfectionnements à la formation de films métalliques par dépôt de vapeur |
Publications (1)
Publication Number | Publication Date |
---|---|
FR85406E true FR85406E (fr) | 1965-08-06 |
Family
ID=8818033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR955938A Expired FR85406E (fr) | 1963-12-03 | 1963-12-03 | Perfectionnements à la formation de films métalliques par dépôt de vapeur |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR85406E (fr) |
-
1963
- 1963-12-03 FR FR955938A patent/FR85406E/fr not_active Expired
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