FR75143E - Semiconductor device manufacturing process - Google Patents

Semiconductor device manufacturing process

Info

Publication number
FR75143E
FR75143E FR788222A FR788222A FR75143E FR 75143 E FR75143 E FR 75143E FR 788222 A FR788222 A FR 788222A FR 788222 A FR788222 A FR 788222A FR 75143 E FR75143 E FR 75143E
Authority
FR
France
Prior art keywords
semiconductor device
manufacturing process
device manufacturing
semiconductor
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR788222A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US542131A external-priority patent/US2898247A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR788222A priority Critical patent/FR75143E/en
Application granted granted Critical
Publication of FR75143E publication Critical patent/FR75143E/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C12/00—Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/02—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H01L21/2251—Diffusion into or out of group IV semiconductors
    • H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)
FR788222A 1955-10-24 1959-03-03 Semiconductor device manufacturing process Expired FR75143E (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR788222A FR75143E (en) 1955-10-24 1959-03-03 Semiconductor device manufacturing process

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US542131A US2898247A (en) 1955-10-24 1955-10-24 Fabrication of diffused junction semi-conductor devices
US73984358A 1958-06-04 1958-06-04
FR788222A FR75143E (en) 1955-10-24 1959-03-03 Semiconductor device manufacturing process

Publications (1)

Publication Number Publication Date
FR75143E true FR75143E (en) 1961-03-13

Family

ID=27066925

Family Applications (2)

Application Number Title Priority Date Filing Date
FR1172044D Expired FR1172044A (en) 1955-10-24 1956-10-23 Semiconductor device manufacturing process
FR788222A Expired FR75143E (en) 1955-10-24 1959-03-03 Semiconductor device manufacturing process

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR1172044D Expired FR1172044A (en) 1955-10-24 1956-10-23 Semiconductor device manufacturing process

Country Status (4)

Country Link
DE (2) DE1163458B (en)
FR (2) FR1172044A (en)
GB (2) GB844692A (en)
NL (2) NL211606A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2937114A (en) * 1959-05-29 1960-05-17 Shockley Transistor Corp Semiconductive device and method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE509317A (en) * 1951-03-07 1900-01-01
DE885756C (en) * 1951-10-08 1953-06-25 Telefunken Gmbh Process for the production of p- or n-conducting layers
US2823149A (en) * 1953-10-27 1958-02-11 Sprague Electric Co Process of forming barrier layers in crystalline bodies
DE1040697B (en) * 1955-03-30 1958-10-09 Siemens Ag Method for doping semiconductor bodies

Also Published As

Publication number Publication date
GB843168A (en) 1960-08-04
GB844692A (en) 1960-08-17
DE1223814B (en) 1966-09-01
DE1163458B (en) 1964-02-20
FR1172044A (en) 1959-02-04
NL109064C (en)
NL211606A (en)

Similar Documents

Publication Publication Date Title
CH331036A (en) Semiconductor device manufacturing process
FR1078708A (en) Semiconductor device manufacturing process
FR1230860A (en) Process for manufacturing semiconductor devices
FR1221347A (en) Semiconductor device manufacturing process
FR1129882A (en) Semiconductor device manufacturing process
FR1170559A (en) Semiconductor device manufacturing process
FR1151572A (en) Manufacturing process of semiconductor devices, with an evaporative welded junction
FR1130712A (en) Semiconductor manufacturing process
FR1197039A (en) Semiconductor device manufacturing process
FR1287279A (en) Semiconductor device manufacturing process
FR1233186A (en) Semiconductor manufacturing process
FR1162834A (en) Semiconductor device manufacturing
FR1182331A (en) Semiconductor devices and their manufacturing process
BE591663A (en) Semiconductor device manufacturing process
FR1173399A (en) Semiconductor device manufacturing process
FR1148323A (en) Semiconductor device manufacturing process
FR1184331A (en) Semiconductor device manufacturing process
FR1172011A (en) Transistor manufacturing process
FR1172044A (en) Semiconductor device manufacturing process
FR1179300A (en) Semiconductor device manufacturing process
FR1117017A (en) Bolt manufacturing process
FR1186004A (en) Semiconductor device manufacturing
FR1181195A (en) New manufacturing process for semiconductor devices
FR1167802A (en) Polyolefin manufacturing process
FR1127000A (en) Semiconductor device manufacturing process