FR3118018B1 - Microsystème électromécanique - Google Patents

Microsystème électromécanique Download PDF

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Publication number
FR3118018B1
FR3118018B1 FR2013820A FR2013820A FR3118018B1 FR 3118018 B1 FR3118018 B1 FR 3118018B1 FR 2013820 A FR2013820 A FR 2013820A FR 2013820 A FR2013820 A FR 2013820A FR 3118018 B1 FR3118018 B1 FR 3118018B1
Authority
FR
France
Prior art keywords
electromechanical
movement
external member
cavity
external
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2013820A
Other languages
English (en)
Other versions
FR3118018A1 (fr
Inventor
Laurent Mollard
Stéphane Nicolas
Damien Saint-Patrice
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR2013820A priority Critical patent/FR3118018B1/fr
Priority to EP21840605.6A priority patent/EP4263419A1/fr
Priority to PCT/EP2021/086648 priority patent/WO2022136188A1/fr
Priority to US18/258,547 priority patent/US20240034616A1/en
Publication of FR3118018A1 publication Critical patent/FR3118018A1/fr
Application granted granted Critical
Publication of FR3118018B1 publication Critical patent/FR3118018B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00341—Processes for manufacturing microsystems not provided for in groups B81C1/00023 - B81C1/00261
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)

Abstract

Titre Microsystème électromécanique L’invention concerne un microsystème électromécanique 1 comprenant un transducteur électromécanique 11, une membrane déformable 12 et une cavité 13 contenant hermétiquement un milieu déformable 14 conservant un volume constant sous l’action d’un changement de pression externe. La membrane déformable forme une paroi de la cavité et présente au moins une zone libre 121 de se déformer. Le transducteur électromécanique est configuré de sorte que son mouvement soit fonction dudit changement de pression externe, et inversement. La zone libre coopère avec un organe externe 2 de sorte que sa déformation induise, ou soit induite par, un mouvement de l’organe externe. Le microsystème électromécanique 1 est ainsi apte à déplacer l’organe externe ou à capter un mouvement de cet organe. Figure pour l’abrégé : Fig. 1A
FR2013820A 2020-12-21 2020-12-21 Microsystème électromécanique Active FR3118018B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR2013820A FR3118018B1 (fr) 2020-12-21 2020-12-21 Microsystème électromécanique
EP21840605.6A EP4263419A1 (fr) 2020-12-21 2021-12-17 Microsystème électromécanique
PCT/EP2021/086648 WO2022136188A1 (fr) 2020-12-21 2021-12-17 Microsystème électromécanique
US18/258,547 US20240034616A1 (en) 2020-12-21 2021-12-17 Electromechanical microsystem

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2013820A FR3118018B1 (fr) 2020-12-21 2020-12-21 Microsystème électromécanique
FR2013820 2020-12-21

Publications (2)

Publication Number Publication Date
FR3118018A1 FR3118018A1 (fr) 2022-06-24
FR3118018B1 true FR3118018B1 (fr) 2023-04-14

Family

ID=74669092

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2013820A Active FR3118018B1 (fr) 2020-12-21 2020-12-21 Microsystème électromécanique

Country Status (4)

Country Link
US (1) US20240034616A1 (fr)
EP (1) EP4263419A1 (fr)
FR (1) FR3118018B1 (fr)
WO (1) WO2022136188A1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2889633A1 (fr) * 2005-08-08 2007-02-09 Commissariat Energie Atomique Dispositif d'actionnement a membrane flexible commandee par electromouillage
FR2930352B1 (fr) * 2008-04-21 2010-09-17 Commissariat Energie Atomique Membrane perfectionnee notamment pour dispositif optique a membrane deformable

Also Published As

Publication number Publication date
US20240034616A1 (en) 2024-02-01
EP4263419A1 (fr) 2023-10-25
FR3118018A1 (fr) 2022-06-24
WO2022136188A1 (fr) 2022-06-30

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