FR3116113B1 - Dispositif et procédé d’estimation de temperatures d’un multicouche comportant une pluralité de couches de materiau - Google Patents

Dispositif et procédé d’estimation de temperatures d’un multicouche comportant une pluralité de couches de materiau Download PDF

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Publication number
FR3116113B1
FR3116113B1 FR2011561A FR2011561A FR3116113B1 FR 3116113 B1 FR3116113 B1 FR 3116113B1 FR 2011561 A FR2011561 A FR 2011561A FR 2011561 A FR2011561 A FR 2011561A FR 3116113 B1 FR3116113 B1 FR 3116113B1
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Prior art keywords
multilayer
temperatures
layers
transfer function
materials present
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FR2011561A
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English (en)
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FR3116113A1 (fr
Inventor
Antoine Guille
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Terakalis
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Terakalis
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Priority to FR2011561A priority Critical patent/FR3116113B1/fr
Priority to PCT/EP2021/081073 priority patent/WO2022101183A1/fr
Publication of FR3116113A1 publication Critical patent/FR3116113A1/fr
Application granted granted Critical
Publication of FR3116113B1 publication Critical patent/FR3116113B1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/006—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
    • G01K11/125—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance using changes in reflectance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

TITRE DE L’INVENTION : DISPOSITIF ET PROCÉDÉ D’ESTIMATION DE TEMPERATURES D’UN MULTICOUCHE COMPORTANT UNE PLURALITÉ DE COUCHES DE MATERIAU Le dispositif (40) d’estimation de températures d’un multicouche (30) comportant une pluralité de couches (31, 32) de matériau, qui comporte :- un moyen (21) d’émission, en direction du multicouche, d’une pluralité d’ondes (33) de fréquences comprises entre 40GHz à 10THz,- un moyen (22, 26) de réception des ondes émises réfléchies et/ou des ondes transmises par le multicouche,- un moyen (23) de mesure d’une fonction de transfert du multicouche,- une mémoire (24) de valeurs de correspondance entre des indices de réfraction complexes et la température pour chacun des matériaux présents dans le multicouche et pour les longueurs d’onde émises et- un moyen (25) de détermination de températures des matériaux présents dans le multicouche, configuré pour sélectionner les températures de matériaux présents dans le multicouche minimisant un écart entre la fonction de transfert mesurée et une fonction de transfert modélisée. Figure pour l'abrégé : Figure 3
FR2011561A 2020-11-10 2020-11-10 Dispositif et procédé d’estimation de temperatures d’un multicouche comportant une pluralité de couches de materiau Active FR3116113B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2011561A FR3116113B1 (fr) 2020-11-10 2020-11-10 Dispositif et procédé d’estimation de temperatures d’un multicouche comportant une pluralité de couches de materiau
PCT/EP2021/081073 WO2022101183A1 (fr) 2020-11-10 2021-11-09 Dispositif et procédé d'estimation de températures d'un multicouche comportant une pluralité de couches de matériau

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2011561 2020-11-10
FR2011561A FR3116113B1 (fr) 2020-11-10 2020-11-10 Dispositif et procédé d’estimation de temperatures d’un multicouche comportant une pluralité de couches de materiau

Publications (2)

Publication Number Publication Date
FR3116113A1 FR3116113A1 (fr) 2022-05-13
FR3116113B1 true FR3116113B1 (fr) 2023-06-23

Family

ID=74125479

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2011561A Active FR3116113B1 (fr) 2020-11-10 2020-11-10 Dispositif et procédé d’estimation de temperatures d’un multicouche comportant une pluralité de couches de materiau

Country Status (2)

Country Link
FR (1) FR3116113B1 (fr)
WO (1) WO2022101183A1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2652653B1 (fr) 1989-09-29 1991-12-13 Centre Nat Rech Scient Analyseur vectoriel de reseau millimetrique et/ou submillimetrique.
US5785426A (en) * 1994-01-14 1998-07-28 Massachusetts Institute Of Technology Self-calibrated active pyrometer for furnace temperature measurements
US7976216B2 (en) * 2007-12-20 2011-07-12 Mattson Technology, Inc. Determining the temperature of silicon at high temperatures
JP6271243B2 (ja) * 2013-12-20 2018-01-31 東京エレクトロン株式会社 厚さ・温度測定装置、厚さ・温度測定方法及び基板処理システム

Also Published As

Publication number Publication date
FR3116113A1 (fr) 2022-05-13
WO2022101183A1 (fr) 2022-05-19

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