FR3106829B1 - Process for manufacturing ceramic matrix composites comprising a specific interphase - Google Patents

Process for manufacturing ceramic matrix composites comprising a specific interphase Download PDF

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FR3106829B1
FR3106829B1 FR2001173A FR2001173A FR3106829B1 FR 3106829 B1 FR3106829 B1 FR 3106829B1 FR 2001173 A FR2001173 A FR 2001173A FR 2001173 A FR2001173 A FR 2001173A FR 3106829 B1 FR3106829 B1 FR 3106829B1
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interphase
fibers
ceramic matrix
matrix composites
coated
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FR3106829A1 (en
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Lionel Gérard Vandenbulcke
Mathieu Pierre Vandenbulcke
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71Ceramic products containing macroscopic reinforcing agents
    • C04B35/78Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80Fibres, filaments, whiskers, platelets, or the like
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/571Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
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    • C04B35/565Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
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    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628Coating the powders or the macroscopic reinforcing agents
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    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628Coating the powders or the macroscopic reinforcing agents
    • C04B35/62844Coating fibres
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    • C04B35/62865Nitrides
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    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
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    • C04B35/62884Coating the powders or the macroscopic reinforcing agents by gas phase techniques
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    • C04B35/62897Coatings characterised by their thickness
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45559Diffusion of reactive gas to substrate
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/614Gas infiltration of green bodies or pre-forms
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    • C04B2235/60Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/616Liquid infiltration of green bodies or pre-forms

Abstract

Procédé de fabrication de composites à matrice céramique comprenant une interphase spécifique Des matériaux composites comportant un renforcement par des fibres et une matrice céramique dans laquelle les fibres revêtues d’une couche mince dénommée interphase sont incluses, sont fabriqués par un procédé caractérisé en ce qu’il comprend : - sur les fibres, la formation d’une interphase par dépôt ou infiltration chimique effectuée en deux étapes enchaînées sans interruption, la principale étape de fabrication étant caractérisée par l’utilisation, pendant au moins 80% du temps de dépôt de toute l’interphase, d’un mélange de gaz composé d’une part au moins d’ammoniac et d’hydrogène et d’autre part de trichlorure de bore et de dichlorure de carbonyle, la concentration de ce dernier étant comprise entre plus de 1% et environ 5% en pourcentage atomique par rapport au trichlorure de bore, interphase dont l’épaisseur totale finale est comprise entre 0,1 et 1 µm ; - le traitement thermique des fibres ainsi revêtues de l’interphase, sans exposition à une atmosphère oxydante après revêtement des fibres par l’interphase, traitement thermique effectué à une température égale ou supérieure à environ 1100°C ; - puis la fabrication du matériau composite par inclusion des fibres revêtues de l’interphase dans la matrice faite de céramique, au moins pour la plus grande partie. Des composites à matrice céramique performants sont fabriqués avec ce procédé moins onéreux.Process for manufacturing ceramic matrix composites comprising a specific interphase Composite materials comprising reinforcement by fibers and a ceramic matrix in which the fibers coated with a thin layer called interphase are included, are manufactured by a process characterized in that it includes: - on the fibers, the formation of an interphase by deposition or chemical infiltration carried out in two stages linked together without interruption, the main manufacturing stage being characterized by the use, for at least 80% of the deposition time of any the interphase, of a mixture of gases composed of at least ammonia and hydrogen on the one hand and boron trichloride and carbonyl dichloride on the other hand, the concentration of the latter being between more than 1 % and approximately 5% in atomic percentage relative to boron trichloride, interphase whose final total thickness is between 0.1 and 1 µm; - the heat treatment of the fibers thus coated with the interphase, without exposure to an oxidizing atmosphere after coating the fibers with the interphase, heat treatment carried out at a temperature equal to or greater than approximately 1100°C; - then the manufacture of the composite material by inclusion of the fibers coated with the interphase in the matrix made of ceramic, at least for the majority. High-performance ceramic matrix composites are manufactured with this less expensive process.

FR2001173A 2020-02-05 2020-02-05 Process for manufacturing ceramic matrix composites comprising a specific interphase Active FR3106829B1 (en)

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Application Number Priority Date Filing Date Title
FR2001173A FR3106829B1 (en) 2020-02-05 2020-02-05 Process for manufacturing ceramic matrix composites comprising a specific interphase
PCT/FR2020/000284 WO2021156549A1 (en) 2020-02-05 2020-12-22 Method for manufacturing ceramic matrix composites comprising a specific interphase
CN202080099288.6A CN115515914B (en) 2020-02-05 2020-12-22 Method for manufacturing ceramic matrix composite material containing specific interface phase

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FR2001173 2020-02-05
FR2001173A FR3106829B1 (en) 2020-02-05 2020-02-05 Process for manufacturing ceramic matrix composites comprising a specific interphase

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FR3106829B1 true FR3106829B1 (en) 2023-09-29

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CN117003566B (en) * 2023-09-27 2023-12-08 中国航发北京航空材料研究院 Preparation device and preparation method of continuous chemical vapor deposition thin belt interface coating

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CN115515914B (en) 2024-02-09
WO2021156549A1 (en) 2021-08-12
CN115515914A (en) 2022-12-23
FR3106829A1 (en) 2021-08-06

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