FR3103896B1 - Dispositif de mesure photo-acoustique multipoints - Google Patents

Dispositif de mesure photo-acoustique multipoints Download PDF

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Publication number
FR3103896B1
FR3103896B1 FR1913490A FR1913490A FR3103896B1 FR 3103896 B1 FR3103896 B1 FR 3103896B1 FR 1913490 A FR1913490 A FR 1913490A FR 1913490 A FR1913490 A FR 1913490A FR 3103896 B1 FR3103896 B1 FR 3103896B1
Authority
FR
France
Prior art keywords
sample
measuring device
acoustic measuring
point photo
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1913490A
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English (en)
Other versions
FR3103896A1 (fr
Inventor
Allaoua Abbas
Yohann Hereau
Julien Michelon
Xavier Tridon
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Individual
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Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR1913490A priority Critical patent/FR3103896B1/fr
Priority to PCT/FR2020/052188 priority patent/WO2021105622A1/fr
Priority to DE112020005985.5T priority patent/DE112020005985T5/de
Priority to US17/756,612 priority patent/US20230003636A1/en
Priority to KR1020227022149A priority patent/KR20220104818A/ko
Publication of FR3103896A1 publication Critical patent/FR3103896A1/fr
Application granted granted Critical
Publication of FR3103896B1 publication Critical patent/FR3103896B1/fr
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1725—Modulation of properties by light, e.g. photoreflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1731—Temperature modulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L’invention présente un procédé de caractérisation physique non destructif et sans contact d’un échantillon par excitations répétées de la surface d’un échantillon avec une séquence d’impulsions comprenant au moins une impulsion pompe par un premier laser « pompe » suivie par une succession de L impulsions décalées temporairement par un second laser « sonde », et l’analyse du faisceau émis par la surface dudit échantillon par un photodétecteur activé, pour l’acquisition des signaux délivrés par les photo détecteurs pendant des fenêtres temporelles constantes.
FR1913490A 2019-11-29 2019-11-29 Dispositif de mesure photo-acoustique multipoints Active FR3103896B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1913490A FR3103896B1 (fr) 2019-11-29 2019-11-29 Dispositif de mesure photo-acoustique multipoints
PCT/FR2020/052188 WO2021105622A1 (fr) 2019-11-29 2020-11-26 Dispositif de mesure photo-acoustique multipoints
DE112020005985.5T DE112020005985T5 (de) 2019-11-29 2020-11-26 Photoakustische Mehrpunkt-Messvorrichtung
US17/756,612 US20230003636A1 (en) 2019-11-29 2020-11-26 Multipoint photo-acoustic measuring device
KR1020227022149A KR20220104818A (ko) 2019-11-29 2020-11-26 다지점 광음향 측정 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1913490A FR3103896B1 (fr) 2019-11-29 2019-11-29 Dispositif de mesure photo-acoustique multipoints
FR1913490 2019-11-29

Publications (2)

Publication Number Publication Date
FR3103896A1 FR3103896A1 (fr) 2021-06-04
FR3103896B1 true FR3103896B1 (fr) 2024-03-08

Family

ID=70918488

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1913490A Active FR3103896B1 (fr) 2019-11-29 2019-11-29 Dispositif de mesure photo-acoustique multipoints

Country Status (5)

Country Link
US (1) US20230003636A1 (fr)
KR (1) KR20220104818A (fr)
DE (1) DE112020005985T5 (fr)
FR (1) FR3103896B1 (fr)
WO (1) WO2021105622A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240329005A1 (en) * 2023-03-31 2024-10-03 Onto Innovation Inc. Multi pump-probe encoding-decoding for opto-acoustic metrology

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3200902B2 (ja) * 1991-12-24 2001-08-20 株式会社日立製作所 光音響信号検出方法及び装置
US5748318A (en) * 1996-01-23 1998-05-05 Brown University Research Foundation Optical stress generator and detector
US5982482A (en) * 1997-07-31 1999-11-09 Massachusetts Institute Of Technology Determining the presence of defects in thin film structures
US7130029B2 (en) * 2000-09-20 2006-10-31 Kla-Tencor Technologies Corp. Methods and systems for determining an adhesion characteristic and a thickness of a specimen
JP3510201B2 (ja) * 2000-10-20 2004-03-22 淳一 櫛引 Ｌｓａｗ伝搬特性測定方法及び測定装置
US7009695B2 (en) * 2003-04-01 2006-03-07 Applied Materials, Inc. Full frame thermal pump probe technique for detecting subsurface defects
FR2892511B1 (fr) * 2005-10-21 2008-05-09 Centre Nat Rech Scient Dispositif d'echantillonnage optique heterodyne
KR102583749B1 (ko) * 2019-05-23 2023-09-26 온투 이노베이션 아이엔씨. 비파괴 검사 및 제조 계측 시스템들 및 방법들
US11056603B2 (en) * 2019-07-12 2021-07-06 Hewlett Packard Enterprise Development Lp Photodetectors with controllable resonant enhancement
CN110426373B (zh) * 2019-07-16 2021-11-26 南昌航空大学 一种布里渊散射和光学相干弹性成像原位检测的方法
WO2021030454A1 (fr) * 2019-08-12 2021-02-18 Photon-X, Inc. Système de gestion de données pour une imagerie de phase spatiale

Also Published As

Publication number Publication date
FR3103896A1 (fr) 2021-06-04
KR20220104818A (ko) 2022-07-26
DE112020005985T5 (de) 2022-12-22
WO2021105622A1 (fr) 2021-06-03
US20230003636A1 (en) 2023-01-05

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