FR3097706B1 - Résonateur radiofréquence contrôlé en température et oscillateur radiofréquence correspondant - Google Patents

Résonateur radiofréquence contrôlé en température et oscillateur radiofréquence correspondant Download PDF

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Publication number
FR3097706B1
FR3097706B1 FR1906710A FR1906710A FR3097706B1 FR 3097706 B1 FR3097706 B1 FR 3097706B1 FR 1906710 A FR1906710 A FR 1906710A FR 1906710 A FR1906710 A FR 1906710A FR 3097706 B1 FR3097706 B1 FR 3097706B1
Authority
FR
France
Prior art keywords
radio frequency
signal
resonator
temperature controlled
enclosure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1906710A
Other languages
English (en)
Other versions
FR3097706A1 (fr
Inventor
Thomas Baron
Gilles Martin
Valérie Soumann
Yannick Gruson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ecole Nat Superieure De Mecanique Et Des Microtechniques Ensmm
Centre National de la Recherche Scientifique CNRS
Original Assignee
Ecole Nat Superieure De Mecanique Et Des Microtechniques Ensmm
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Nat Superieure De Mecanique Et Des Microtechniques Ensmm, Centre National de la Recherche Scientifique CNRS filed Critical Ecole Nat Superieure De Mecanique Et Des Microtechniques Ensmm
Priority to FR1906710A priority Critical patent/FR3097706B1/fr
Priority to EP20727687.4A priority patent/EP3987659A1/fr
Priority to CN202080045467.1A priority patent/CN114402529A/zh
Priority to PCT/EP2020/064923 priority patent/WO2020254090A1/fr
Priority to JP2021576309A priority patent/JP2022542215A/ja
Priority to US17/620,829 priority patent/US11716054B2/en
Publication of FR3097706A1 publication Critical patent/FR3097706A1/fr
Application granted granted Critical
Publication of FR3097706B1 publication Critical patent/FR3097706B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/08—Holders with means for regulating temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B1/00—Details
    • H03B1/02—Structural details of power oscillators, e.g. for heating
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H03L1/04—Constructional details for maintaining temperature constant
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)

Abstract

Résonateur radiofréquence contrôlé en température et oscillateur radiofréquence correspondant L'invention concerne un résonateur RF (200) contrôlé en température et comprenant une enceinte (110) thermique isolante à l’intérieur de laquelle sont implémentés : - au moins un élément résonant (120) configuré pour délivrer un signal RF (120s) de sortie lorsqu’il est alimenté par un signal RF d’entrée (120e) ; - au moins un élément chauffant (130) configuré pour fournir une énergie thermique au sein de l’enceinte thermique lorsque l’au moins un élément chauffant est alimenté par un signal électrique BF (130ali) d’alimentation ; et - au moins une sonde de température (140) configurée pour délivrer un signal électrique BF de mesure (140mes) fonction d’une température à l’intérieur de l’enceinte thermique. Un tel résonateur RF comprend au moins un port d’entrée/sortie (200es1, 200es2) traversant l’enceinte thermique isolante et propageant au moins : - un signal parmi les signaux RF (120e, 120s) ; et - un autre signal parmi les signaux électriques BF (130ali, 140mes). Figure d’abrégé : Fig. 2
FR1906710A 2019-06-21 2019-06-21 Résonateur radiofréquence contrôlé en température et oscillateur radiofréquence correspondant Active FR3097706B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1906710A FR3097706B1 (fr) 2019-06-21 2019-06-21 Résonateur radiofréquence contrôlé en température et oscillateur radiofréquence correspondant
EP20727687.4A EP3987659A1 (fr) 2019-06-21 2020-05-28 Resonateur radiofrequence controle en temperature et oscillateur radiofrequence correspondant
CN202080045467.1A CN114402529A (zh) 2019-06-21 2020-05-28 温度受控射频谐振器和对应的射频振荡器
PCT/EP2020/064923 WO2020254090A1 (fr) 2019-06-21 2020-05-28 Resonateur radiofrequence controle en temperature et oscillateur radiofrequence correspondant
JP2021576309A JP2022542215A (ja) 2019-06-21 2020-05-28 温度制御式無線周波数共振器及び対応する無線周波数発振器
US17/620,829 US11716054B2 (en) 2019-06-21 2020-05-28 Temperature-controlled radio-frequency resonator and corresponding radio-frequency oscillator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1906710A FR3097706B1 (fr) 2019-06-21 2019-06-21 Résonateur radiofréquence contrôlé en température et oscillateur radiofréquence correspondant
FR1906710 2019-06-21

Publications (2)

Publication Number Publication Date
FR3097706A1 FR3097706A1 (fr) 2020-12-25
FR3097706B1 true FR3097706B1 (fr) 2022-02-11

Family

ID=68733151

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1906710A Active FR3097706B1 (fr) 2019-06-21 2019-06-21 Résonateur radiofréquence contrôlé en température et oscillateur radiofréquence correspondant

Country Status (6)

Country Link
US (1) US11716054B2 (fr)
EP (1) EP3987659A1 (fr)
JP (1) JP2022542215A (fr)
CN (1) CN114402529A (fr)
FR (1) FR3097706B1 (fr)
WO (1) WO2020254090A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2597495Y2 (ja) * 1991-07-31 1999-07-05 株式会社明電舎 温度補償形水晶発振器
CN1771664B (zh) * 2003-04-11 2011-09-28 Nxp股份有限公司 用于检测振荡器晶体的温度的装置
US20120305542A1 (en) * 2011-06-01 2012-12-06 Imec Oven Controlled MEMS Oscillator Device
EP2595315A1 (fr) * 2011-11-17 2013-05-22 Imec Système thermostaté contenant un résonateur micro-électromécanique
US9712128B2 (en) * 2014-02-09 2017-07-18 Sitime Corporation Microelectromechanical resonator
JP6828286B2 (ja) * 2016-06-27 2021-02-10 セイコーエプソン株式会社 発振器、電子機器および移動体

Also Published As

Publication number Publication date
WO2020254090A1 (fr) 2020-12-24
US11716054B2 (en) 2023-08-01
US20220311384A1 (en) 2022-09-29
CN114402529A (zh) 2022-04-26
JP2022542215A (ja) 2022-09-30
EP3987659A1 (fr) 2022-04-27
FR3097706A1 (fr) 2020-12-25

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