FR3094089B1 - Capteur de gaz par mesure gravimétrique - Google Patents
Capteur de gaz par mesure gravimétrique Download PDFInfo
- Publication number
- FR3094089B1 FR3094089B1 FR1902840A FR1902840A FR3094089B1 FR 3094089 B1 FR3094089 B1 FR 3094089B1 FR 1902840 A FR1902840 A FR 1902840A FR 1902840 A FR1902840 A FR 1902840A FR 3094089 B1 FR3094089 B1 FR 3094089B1
- Authority
- FR
- France
- Prior art keywords
- gas sensor
- membranes
- heating
- main portion
- gravimetric gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 abstract 3
- 239000012528 membrane Substances 0.000 abstract 3
- 238000007306 functionalization reaction Methods 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/021—Gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
L’invention concerne un capteur de gaz (100) par mesure gravimétrique qui comprend :- une ou plusieurs membranes (110) comprenant une portion principale (110a) suspendue ;- une ou plusieurs couches de fonctionnalisation formée(s) sur la portion principale (110a) et configurée(s) pour adsorber sélectivement une espèce gazeuse donnée, et désorber cette dernière en fonction d’un niveau de chauffage imposé à l’une ou plusieurs membranes (110) ;- une ou plusieurs pistes chauffantes (170) agencées sur l’une ou plusieurs membranes (110) pour imposer un chauffage à l’une ou plusieurs couches de fonctionnalisation. Figure pour l’abrégé : Figure 2a.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1902840A FR3094089B1 (fr) | 2019-03-20 | 2019-03-20 | Capteur de gaz par mesure gravimétrique |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1902840A FR3094089B1 (fr) | 2019-03-20 | 2019-03-20 | Capteur de gaz par mesure gravimétrique |
FR1902840 | 2019-03-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3094089A1 FR3094089A1 (fr) | 2020-09-25 |
FR3094089B1 true FR3094089B1 (fr) | 2021-07-23 |
Family
ID=67742585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1902840A Active FR3094089B1 (fr) | 2019-03-20 | 2019-03-20 | Capteur de gaz par mesure gravimétrique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR3094089B1 (fr) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7694346B2 (en) * | 2004-10-01 | 2010-04-06 | Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada | Cantilevered probe detector with piezoelectric element |
DE102005043039B4 (de) * | 2005-09-09 | 2008-10-30 | Siemens Ag | Vorrichtung mit piezoakustischem Resonatorelement, Verfahren zu dessen Herstellung und Verfahren zur Ausgabe eines Signals in Abhängigkeit einer Resonanzfrequenz |
US8448494B2 (en) * | 2008-12-30 | 2013-05-28 | Stmicroelectronics S.R.L. | Integrated electronic microbalance plus chemical sensor |
US9366651B2 (en) * | 2013-07-03 | 2016-06-14 | Matrix Sensors, Inc. | Array of sensors with surface modifications |
US20160202225A1 (en) * | 2015-01-09 | 2016-07-14 | Case Western Reserve University | System for Detecting a Gas and Method Therefor |
US20180003677A1 (en) * | 2016-06-30 | 2018-01-04 | Intel Corporation | Piezoelectric package-integrated chemical species-sensitive resonant devices |
-
2019
- 2019-03-20 FR FR1902840A patent/FR3094089B1/fr active Active
Also Published As
Publication number | Publication date |
---|---|
FR3094089A1 (fr) | 2020-09-25 |
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Legal Events
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PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20200925 |
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PLFP | Fee payment |
Year of fee payment: 3 |
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PLFP | Fee payment |
Year of fee payment: 4 |
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PLFP | Fee payment |
Year of fee payment: 5 |
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PLFP | Fee payment |
Year of fee payment: 6 |