FR3094089B1 - Capteur de gaz par mesure gravimétrique - Google Patents

Capteur de gaz par mesure gravimétrique Download PDF

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Publication number
FR3094089B1
FR3094089B1 FR1902840A FR1902840A FR3094089B1 FR 3094089 B1 FR3094089 B1 FR 3094089B1 FR 1902840 A FR1902840 A FR 1902840A FR 1902840 A FR1902840 A FR 1902840A FR 3094089 B1 FR3094089 B1 FR 3094089B1
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FR
France
Prior art keywords
gas sensor
membranes
heating
main portion
gravimetric gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1902840A
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English (en)
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FR3094089A1 (fr
Inventor
Bruno Fain
Jean-Claude Bastien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1902840A priority Critical patent/FR3094089B1/fr
Publication of FR3094089A1 publication Critical patent/FR3094089A1/fr
Application granted granted Critical
Publication of FR3094089B1 publication Critical patent/FR3094089B1/fr
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

L’invention concerne un capteur de gaz (100) par mesure gravimétrique qui comprend :- une ou plusieurs membranes (110) comprenant une portion principale (110a) suspendue ;- une ou plusieurs couches de fonctionnalisation formée(s) sur la portion principale (110a) et configurée(s) pour adsorber sélectivement une espèce gazeuse donnée, et désorber cette dernière en fonction d’un niveau de chauffage imposé à l’une ou plusieurs membranes (110) ;- une ou plusieurs pistes chauffantes (170) agencées sur l’une ou plusieurs membranes (110) pour imposer un chauffage à l’une ou plusieurs couches de fonctionnalisation. Figure pour l’abrégé : Figure 2a.
FR1902840A 2019-03-20 2019-03-20 Capteur de gaz par mesure gravimétrique Active FR3094089B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1902840A FR3094089B1 (fr) 2019-03-20 2019-03-20 Capteur de gaz par mesure gravimétrique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1902840A FR3094089B1 (fr) 2019-03-20 2019-03-20 Capteur de gaz par mesure gravimétrique
FR1902840 2019-03-20

Publications (2)

Publication Number Publication Date
FR3094089A1 FR3094089A1 (fr) 2020-09-25
FR3094089B1 true FR3094089B1 (fr) 2021-07-23

Family

ID=67742585

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1902840A Active FR3094089B1 (fr) 2019-03-20 2019-03-20 Capteur de gaz par mesure gravimétrique

Country Status (1)

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FR (1) FR3094089B1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7694346B2 (en) * 2004-10-01 2010-04-06 Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
DE102005043039B4 (de) * 2005-09-09 2008-10-30 Siemens Ag Vorrichtung mit piezoakustischem Resonatorelement, Verfahren zu dessen Herstellung und Verfahren zur Ausgabe eines Signals in Abhängigkeit einer Resonanzfrequenz
US8448494B2 (en) * 2008-12-30 2013-05-28 Stmicroelectronics S.R.L. Integrated electronic microbalance plus chemical sensor
US9366651B2 (en) * 2013-07-03 2016-06-14 Matrix Sensors, Inc. Array of sensors with surface modifications
US20160202225A1 (en) * 2015-01-09 2016-07-14 Case Western Reserve University System for Detecting a Gas and Method Therefor
US20180003677A1 (en) * 2016-06-30 2018-01-04 Intel Corporation Piezoelectric package-integrated chemical species-sensitive resonant devices

Also Published As

Publication number Publication date
FR3094089A1 (fr) 2020-09-25

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