FR3089022A1 - Installation d’interféromètre et son procédé de réalisation - Google Patents
Installation d’interféromètre et son procédé de réalisation Download PDFInfo
- Publication number
- FR3089022A1 FR3089022A1 FR1913074A FR1913074A FR3089022A1 FR 3089022 A1 FR3089022 A1 FR 3089022A1 FR 1913074 A FR1913074 A FR 1913074A FR 1913074 A FR1913074 A FR 1913074A FR 3089022 A1 FR3089022 A1 FR 3089022A1
- Authority
- FR
- France
- Prior art keywords
- mirror
- layer
- installation
- thickness
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 title claims abstract description 153
- 238000004519 manufacturing process Methods 0.000 title abstract description 11
- 230000003287 optical effect Effects 0.000 claims abstract description 86
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 description 8
- 230000002787 reinforcement Effects 0.000 description 8
- 230000035882 stress Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102018220481.0A DE102018220481A1 (de) | 2018-11-28 | 2018-11-28 | Interferometereinrichtung und Verfahren zum Herstellen einer Interferometereinrichtung |
| DE102018220481.0 | 2018-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR3089022A1 true FR3089022A1 (fr) | 2020-05-29 |
Family
ID=70545932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1913074A Pending FR3089022A1 (fr) | 2018-11-28 | 2019-11-22 | Installation d’interféromètre et son procédé de réalisation |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102018220481A1 (de) |
| FR (1) | FR3089022A1 (de) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6438149B1 (en) * | 1998-06-26 | 2002-08-20 | Coretek, Inc. | Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter |
| US6400738B1 (en) | 2000-04-14 | 2002-06-04 | Agilent Technologies, Inc. | Tunable Fabry-Perot filters and lasers |
| JP2011027780A (ja) * | 2009-07-21 | 2011-02-10 | Denso Corp | ファブリペロー干渉計及びその製造方法 |
| FI125897B (fi) * | 2011-06-06 | 2016-03-31 | Teknologian Tutkimuskeskus Vtt Oy | Mikromekaanisesti säädettävä Fabry-Perot-interferometri ja menetelmä sen valmistamiseksi |
-
2018
- 2018-11-28 DE DE102018220481.0A patent/DE102018220481A1/de not_active Withdrawn
-
2019
- 2019-11-22 FR FR1913074A patent/FR3089022A1/fr active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE102018220481A1 (de) | 2020-05-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PLFP | Fee payment |
Year of fee payment: 2 |
|
| PLFP | Fee payment |
Year of fee payment: 3 |
|
| PLSC | Publication of the preliminary search report |
Effective date: 20220211 |
|
| PLFP | Fee payment |
Year of fee payment: 4 |
|
| RX | Complete rejection |
Effective date: 20230914 |