FR3087268B1 - DEVICE FOR MEASURING AMBIENT HUMIDITY AND TEMPERATURE LEVELS BY MICRO-BEAM OSCILLATORS - Google Patents

DEVICE FOR MEASURING AMBIENT HUMIDITY AND TEMPERATURE LEVELS BY MICRO-BEAM OSCILLATORS Download PDF

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Publication number
FR3087268B1
FR3087268B1 FR1859527A FR1859527A FR3087268B1 FR 3087268 B1 FR3087268 B1 FR 3087268B1 FR 1859527 A FR1859527 A FR 1859527A FR 1859527 A FR1859527 A FR 1859527A FR 3087268 B1 FR3087268 B1 FR 3087268B1
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FR
France
Prior art keywords
micro
ambient humidity
temperature levels
representative
ambient air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1859527A
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French (fr)
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FR3087268A1 (en
Inventor
Vincent Aubry
Simon Grall
Helene Debeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite de Bordeaux
Institut Polytechnique de Bordeaux
PSA Automobiles SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite de Bordeaux
Institut Polytechnique de Bordeaux
PSA Automobiles SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite de Bordeaux, Institut Polytechnique de Bordeaux, PSA Automobiles SA filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1859527A priority Critical patent/FR3087268B1/en
Publication of FR3087268A1 publication Critical patent/FR3087268A1/en
Application granted granted Critical
Publication of FR3087268B1 publication Critical patent/FR3087268B1/en
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
    • G01K11/26—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
    • G01N29/326—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise compensating for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G01N29/348—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with frequency characteristics, e.g. single frequency signals, chirp signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02881—Temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

Un dispositif de mesure (DM) comprend : - un support (SP) muni d'un premier oscillateur (01), comprenant une première micro-poutre (MP1) sensible à la température et excitée à une première fréquence de résonance, et délivrant un premier signal s1 représentatif d'une première fréquence de vibration de la première micro-poutre (MP1) dans l'air ambiant, et un second oscillateur (02), comprenant une seconde micro-poutre (MP2) sensible au taux d'humidité et excitée à une seconde fréquence de résonance, et délivrant un second signal s2 représentatif d'une seconde fréquence de vibration de la seconde micro-poutre (MP2) dans l'air ambiant, et - un calculateur (CA) déterminant une première valeur v1 représentative de la température de l'air ambiant en fonction du premier signal délivré s1, et une seconde valeur v2 représentative du taux d'humidité de l'air ambiant en fonction du second signal s2 délivré et de la première valeur v1.A measuring device (DM) comprises: - a support (SP) provided with a first oscillator (01), comprising a first micro-beam (MP1) sensitive to temperature and excited at a first resonant frequency, and delivering a first signal s1 representative of a first frequency of vibration of the first micro-beam (MP1) in ambient air, and a second oscillator (02), comprising a second micro-beam (MP2) sensitive to the humidity level and excited at a second resonant frequency, and delivering a second signal s2 representative of a second vibration frequency of the second micro-beam (MP2) in the ambient air, and - a computer (CA) determining a first representative value v1 of the temperature of the ambient air as a function of the first signal delivered s1, and a second value v2 representative of the humidity of the ambient air as a function of the second signal s2 delivered and of the first value v1.

FR1859527A 2018-10-15 2018-10-15 DEVICE FOR MEASURING AMBIENT HUMIDITY AND TEMPERATURE LEVELS BY MICRO-BEAM OSCILLATORS Active FR3087268B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1859527A FR3087268B1 (en) 2018-10-15 2018-10-15 DEVICE FOR MEASURING AMBIENT HUMIDITY AND TEMPERATURE LEVELS BY MICRO-BEAM OSCILLATORS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1859527A FR3087268B1 (en) 2018-10-15 2018-10-15 DEVICE FOR MEASURING AMBIENT HUMIDITY AND TEMPERATURE LEVELS BY MICRO-BEAM OSCILLATORS

Publications (2)

Publication Number Publication Date
FR3087268A1 FR3087268A1 (en) 2020-04-17
FR3087268B1 true FR3087268B1 (en) 2020-10-23

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Application Number Title Priority Date Filing Date
FR1859527A Active FR3087268B1 (en) 2018-10-15 2018-10-15 DEVICE FOR MEASURING AMBIENT HUMIDITY AND TEMPERATURE LEVELS BY MICRO-BEAM OSCILLATORS

Country Status (1)

Country Link
FR (1) FR3087268B1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8479560B2 (en) * 2010-03-30 2013-07-09 Honeywell International Inc. Differential resonant sensor apparatus and method for detecting relative humidity
CN102853934B (en) * 2012-07-27 2015-04-15 上海赛赫信息科技有限公司 Wireless temperature and humidity sensor and system and measuring method

Also Published As

Publication number Publication date
FR3087268A1 (en) 2020-04-17

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