FR3087006B1 - Dispositif de detection pyroelectrique a membrane suspendue - Google Patents

Dispositif de detection pyroelectrique a membrane suspendue Download PDF

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Publication number
FR3087006B1
FR3087006B1 FR1859235A FR1859235A FR3087006B1 FR 3087006 B1 FR3087006 B1 FR 3087006B1 FR 1859235 A FR1859235 A FR 1859235A FR 1859235 A FR1859235 A FR 1859235A FR 3087006 B1 FR3087006 B1 FR 3087006B1
Authority
FR
France
Prior art keywords
detection device
pyroelectric detection
pyroelectric
suspended diaphragm
stack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1859235A
Other languages
English (en)
Other versions
FR3087006A1 (fr
Inventor
Rhun Gwenael Le
Stephane Fanget
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1859235A priority Critical patent/FR3087006B1/fr
Publication of FR3087006A1 publication Critical patent/FR3087006A1/fr
Application granted granted Critical
Publication of FR3087006B1 publication Critical patent/FR3087006B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/044—Environment with strong vibrations or shocks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/068—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling parameters other than temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

Dispositif (100) de détection pyroélectrique, comprenant un empilement comportant au moins : - une membrane (104) suspendue ; - un élément (112) de détection pyroélectrique disposé sur la membrane (104) suspendue ou formant au moins une partie de la membrane (104) suspendue, et comprenant au moins une portion (116) de matériau pyroélectrique disposée entre des première et deuxième électrodes (114, 118) ; et dans lequel l'empilement est configuré tel que la ligne neutre de l'empilement soit positionnée dans la portion (116) de matériau pyroélectrique.
FR1859235A 2018-10-05 2018-10-05 Dispositif de detection pyroelectrique a membrane suspendue Expired - Fee Related FR3087006B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1859235A FR3087006B1 (fr) 2018-10-05 2018-10-05 Dispositif de detection pyroelectrique a membrane suspendue

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1859235A FR3087006B1 (fr) 2018-10-05 2018-10-05 Dispositif de detection pyroelectrique a membrane suspendue

Publications (2)

Publication Number Publication Date
FR3087006A1 FR3087006A1 (fr) 2020-04-10
FR3087006B1 true FR3087006B1 (fr) 2021-03-12

Family

ID=66530078

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1859235A Expired - Fee Related FR3087006B1 (fr) 2018-10-05 2018-10-05 Dispositif de detection pyroelectrique a membrane suspendue

Country Status (1)

Country Link
FR (1) FR3087006B1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11132855A (ja) * 1997-11-04 1999-05-21 Matsushita Electric Ind Co Ltd 焦電型赤外線センサ

Also Published As

Publication number Publication date
FR3087006A1 (fr) 2020-04-10

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Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20200410

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Year of fee payment: 3

ST Notification of lapse

Effective date: 20220605