FR3081173B1 - Four de solidification dirigee de cristaux - Google Patents

Four de solidification dirigee de cristaux Download PDF

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Publication number
FR3081173B1
FR3081173B1 FR1854113A FR1854113A FR3081173B1 FR 3081173 B1 FR3081173 B1 FR 3081173B1 FR 1854113 A FR1854113 A FR 1854113A FR 1854113 A FR1854113 A FR 1854113A FR 3081173 B1 FR3081173 B1 FR 3081173B1
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France
Prior art keywords
rotation
axis
crystals
crucible
symmetry
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Active
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FR1854113A
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English (en)
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FR3081173A1 (fr
Inventor
Jean-Luc Grand-Clement
Gilles Repellin
Stephane Ravet
Robin Vernier
Gautier FORTIN
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Ecm Greentech
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Ecm Greentech
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Priority to FR1854113A priority Critical patent/FR3081173B1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/003—Heating or cooling of the melt or the crystallised material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)

Abstract

L'invention concerne un four de solidification dirigée de cristaux comprenant un creuset (7), le creuset étant destiné à contenir les cristaux et comportant un axe de symétrie (Δ1). Le four comprend successivement, selon l'axe de symétrie le creuset, des éléments de chauffage (21), une isolation thermique (29) et un échangeur thermique (27). L'isolation thermique comprend des premiers et deuxièmes volets (30), chaque premier et deuxième volet pouvant pivoter autour d'un axe de rotation perpendiculaire à l'axe de symétrie, les axes de rotation étant parallèles. Le four comprend un système d'actionnement adapté à faire pivoter simultanément chaque premier volet autour de son axe de rotation dans un premier sens de rotation et chaque deuxième volet autour de son axe de rotation dans un deuxième sens de rotation, le premier sens de rotation étant opposé au deuxième sens de rotation.
FR1854113A 2018-05-17 2018-05-17 Four de solidification dirigee de cristaux Active FR3081173B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1854113A FR3081173B1 (fr) 2018-05-17 2018-05-17 Four de solidification dirigee de cristaux

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1854113A FR3081173B1 (fr) 2018-05-17 2018-05-17 Four de solidification dirigee de cristaux
FR1854113 2018-05-17

Publications (2)

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FR3081173A1 FR3081173A1 (fr) 2019-11-22
FR3081173B1 true FR3081173B1 (fr) 2020-05-29

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FR1854113A Active FR3081173B1 (fr) 2018-05-17 2018-05-17 Four de solidification dirigee de cristaux

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FR (1) FR3081173B1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100955221B1 (ko) * 2007-10-05 2010-04-29 주식회사 글로실 힌지를 이용한 도어 개폐장치가 구비된 태양전지용 다결정실리콘 주괴 제조 장치
FR2928665B1 (fr) * 2008-03-14 2010-04-09 Thermique Ind Vide Four industriel pour la fabrication d'un lingot de materiau cristallin
KR20100024675A (ko) * 2008-08-26 2010-03-08 주식회사 아바코 잉곳 제조 장치 및 제조 방법
KR101217458B1 (ko) * 2009-09-24 2013-01-07 주식회사 글로실 회전형 도어 개폐장치가 구비된 다결정 실리콘 주괴 제조장치
KR101345747B1 (ko) * 2011-08-18 2013-12-30 한국화학연구원 반도체 또는 금속산화물 잉곳 제조장치

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FR3081173A1 (fr) 2019-11-22

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