FR3066820B1 - Dispositif de reconstruction en trois dimensions d'une surface d'un objet - Google Patents

Dispositif de reconstruction en trois dimensions d'une surface d'un objet Download PDF

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Publication number
FR3066820B1
FR3066820B1 FR1754574A FR1754574A FR3066820B1 FR 3066820 B1 FR3066820 B1 FR 3066820B1 FR 1754574 A FR1754574 A FR 1754574A FR 1754574 A FR1754574 A FR 1754574A FR 3066820 B1 FR3066820 B1 FR 3066820B1
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France
Prior art keywords
light
dimensional reconstruction
onto
project
hand
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Active
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FR1754574A
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English (en)
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FR3066820A1 (fr
Inventor
Frederic Itthirad
Mohamed Bouabdellah
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Nt2i
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Nt2i
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Priority to FR1754574A priority Critical patent/FR3066820B1/fr
Publication of FR3066820A1 publication Critical patent/FR3066820A1/fr
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Publication of FR3066820B1 publication Critical patent/FR3066820B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Dispositif (1) de reconstruction en trois dimensions d'une surface (2a) d'un objet (2), le dispositif (1) comprenant au moins une source lumineuse (4) destinée à projeter un faisceau lumineux (3) sur la surface (2a), au moins un système (7) de capture d'images du profil lumineux produit par le faisceau projeté sur la surface (2a), des moyens de déplacement relatif du faisceau sur la surface (2a), et des moyens de traitement des images capturées. Selon l'invention, le dispositif (1) comprend au moins un élément (6) de conduction de la lumière connecté d'une part, à la source lumineuse (4) et, d'autre part, à une tête de projection (5) déportée destinée à projeter le faisceau lumineux (3) sur la surface (2a) à reconstruire.
FR1754574A 2017-05-23 2017-05-23 Dispositif de reconstruction en trois dimensions d'une surface d'un objet Active FR3066820B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1754574A FR3066820B1 (fr) 2017-05-23 2017-05-23 Dispositif de reconstruction en trois dimensions d'une surface d'un objet

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1754574 2017-05-23
FR1754574A FR3066820B1 (fr) 2017-05-23 2017-05-23 Dispositif de reconstruction en trois dimensions d'une surface d'un objet

Publications (2)

Publication Number Publication Date
FR3066820A1 FR3066820A1 (fr) 2018-11-30
FR3066820B1 true FR3066820B1 (fr) 2023-03-24

Family

ID=59253801

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1754574A Active FR3066820B1 (fr) 2017-05-23 2017-05-23 Dispositif de reconstruction en trois dimensions d'une surface d'un objet

Country Status (1)

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FR (1) FR3066820B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5418879A (en) * 1994-04-04 1995-05-23 Chrysler Corporation Distributed light delivery system
EP2272417B1 (fr) * 2009-07-10 2016-11-09 GE Inspection Technologies, LP Système de projection de frange pour sonde adapté à une analyse de commutation de phase
US9885671B2 (en) * 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge

Also Published As

Publication number Publication date
FR3066820A1 (fr) 2018-11-30

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